12/3/2012	8:26:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2012	8:26:59 AM	Recipe started at 8:26 AM
12/3/2012	8:26:59 AM	Helium valve closed
12/3/2012	8:26:59 AM	H2 valve closed
12/3/2012	8:26:59 AM	BCl3 valve closed
12/3/2012	8:26:59 AM	PH3 valve closed
12/3/2012	8:26:59 AM	SiCl4 pre valve closed
12/3/2012	8:26:59 AM	SiCl4 post valve closed
12/3/2012	8:26:59 AM	Main Vac valve closed
12/3/2012	8:26:59 AM	Bypass valve closed
12/3/2012	8:26:59 AM	Bubbler valve closed
12/3/2012	8:26:59 AM	Helium MFC set to  0.000000
12/3/2012	8:26:59 AM	H2 MFC set to  0.000000
12/3/2012	8:26:59 AM	BCl3 MFC set to  0.000000
12/3/2012	8:26:59 AM	PH3 MFC set to  0.000000
12/3/2012	8:26:59 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:26:59 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:26:59 AM	Tube furnace set to 0
12/3/2012	8:27:02 AM	H2 valve closed
12/3/2012	8:27:03 AM	BCl3 valve closed
12/3/2012	8:27:03 AM	PH3 valve closed
12/3/2012	8:27:03 AM	SiCl4 pre valve closed
12/3/2012	8:27:03 AM	SiCl4 post valve closed
12/3/2012	8:27:03 AM	Main Vac valve closed
12/3/2012	8:27:03 AM	Bypass valve closed
12/3/2012	8:27:03 AM	Bubbler valve closed
12/3/2012	8:27:03 AM	Helium valve opened
12/3/2012	8:27:03 AM	Helium MFC set to  500.000000
12/3/2012	8:27:03 AM	H2 MFC set to  0.000000
12/3/2012	8:27:03 AM	BCl3 MFC set to  0.000000
12/3/2012	8:27:03 AM	PH3 MFC set to  0.000000
12/3/2012	8:27:03 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:27:03 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:27:03 AM	Tube furnace set to 0
12/3/2012	8:28:15 AM	Helium valve closed
12/3/2012	8:28:15 AM	H2 valve closed
12/3/2012	8:28:15 AM	BCl3 valve closed
12/3/2012	8:28:15 AM	PH3 valve closed
12/3/2012	8:28:15 AM	SiCl4 pre valve closed
12/3/2012	8:28:15 AM	SiCl4 post valve closed
12/3/2012	8:28:15 AM	Main Vac valve closed
12/3/2012	8:28:15 AM	Bypass valve closed
12/3/2012	8:28:15 AM	Bubbler valve closed
12/3/2012	8:28:15 AM	Helium MFC set to  0.000000
12/3/2012	8:28:15 AM	H2 MFC set to  0.000000
12/3/2012	8:28:15 AM	BCl3 MFC set to  0.000000
12/3/2012	8:28:15 AM	PH3 MFC set to  0.000000
12/3/2012	8:28:15 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:28:15 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:28:15 AM	Tube furnace set to 0
12/3/2012	8:28:16 AM	Run finished at 8:28 AM
12/3/2012	8:28:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2012	8:39:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	8:39:26 AM	Recipe started at 8:39 AM
12/3/2012	8:39:26 AM	Helium valve closed
12/3/2012	8:39:26 AM	H2 valve closed
12/3/2012	8:39:26 AM	BCl3 valve closed
12/3/2012	8:39:26 AM	PH3 valve closed
12/3/2012	8:39:26 AM	SiCl4 pre valve closed
12/3/2012	8:39:26 AM	SiCl4 post valve closed
12/3/2012	8:39:26 AM	Main Vac valve closed
12/3/2012	8:39:26 AM	Bubbler valve closed
12/3/2012	8:39:26 AM	Bypass valve opened
12/3/2012	8:39:26 AM	Helium MFC set to  0.000000
12/3/2012	8:39:26 AM	H2 MFC set to  0.000000
12/3/2012	8:39:26 AM	BCl3 MFC set to  0.000000
12/3/2012	8:39:26 AM	PH3 MFC set to  0.000000
12/3/2012	8:39:26 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:39:26 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:39:26 AM	Tube furnace set to 0
12/3/2012	8:40:50 AM	Helium valve closed
12/3/2012	8:40:50 AM	H2 valve closed
12/3/2012	8:40:50 AM	BCl3 valve closed
12/3/2012	8:40:50 AM	PH3 valve closed
12/3/2012	8:40:50 AM	SiCl4 pre valve closed
12/3/2012	8:40:50 AM	SiCl4 post valve closed
12/3/2012	8:40:50 AM	Main Vac valve closed
12/3/2012	8:40:50 AM	Bubbler valve closed
12/3/2012	8:40:50 AM	Bypass valve opened
12/3/2012	8:40:50 AM	Helium MFC set to  0.000000
12/3/2012	8:40:50 AM	H2 MFC set to  0.000000
12/3/2012	8:40:50 AM	BCl3 MFC set to  0.000000
12/3/2012	8:40:50 AM	PH3 MFC set to  0.000000
12/3/2012	8:40:50 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:40:50 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:40:50 AM	Tube furnace set to 0
12/3/2012	8:41:50 AM	Helium valve closed
12/3/2012	8:41:50 AM	H2 valve closed
12/3/2012	8:41:50 AM	BCl3 valve closed
12/3/2012	8:41:50 AM	PH3 valve closed
12/3/2012	8:41:50 AM	SiCl4 pre valve closed
12/3/2012	8:41:50 AM	SiCl4 post valve closed
12/3/2012	8:41:50 AM	Bypass valve closed
12/3/2012	8:41:50 AM	Bubbler valve closed
12/3/2012	8:41:50 AM	Main Vac valve opened
12/3/2012	8:41:50 AM	Helium MFC set to  0.000000
12/3/2012	8:41:50 AM	H2 MFC set to  0.000000
12/3/2012	8:41:50 AM	BCl3 MFC set to  0.000000
12/3/2012	8:41:50 AM	PH3 MFC set to  0.000000
12/3/2012	8:41:50 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:41:50 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:41:50 AM	Tube furnace set to 0
12/3/2012	8:41:51 AM	Run finished at 8:41 AM
12/3/2012	8:41:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	8:42:27 AM	Recipe started at 8:42 AM
12/3/2012	8:42:27 AM	Helium valve closed
12/3/2012	8:42:27 AM	H2 valve closed
12/3/2012	8:42:27 AM	BCl3 valve closed
12/3/2012	8:42:27 AM	PH3 valve closed
12/3/2012	8:42:27 AM	SiCl4 pre valve closed
12/3/2012	8:42:27 AM	SiCl4 post valve closed
12/3/2012	8:42:27 AM	Bypass valve closed
12/3/2012	8:42:27 AM	Bubbler valve closed
12/3/2012	8:42:27 AM	Main Vac valve opened
12/3/2012	8:42:27 AM	Helium MFC set to  0.000000
12/3/2012	8:42:27 AM	H2 MFC set to  0.000000
12/3/2012	8:42:27 AM	BCl3 MFC set to  0.000000
12/3/2012	8:42:27 AM	PH3 MFC set to  0.000000
12/3/2012	8:42:27 AM	SiCl4 MFC set to  0.000000
12/3/2012	8:42:27 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	8:42:27 AM	Tube furnace set to 150
12/3/2012	9:12:27 AM	H2 valve closed
12/3/2012	9:12:27 AM	BCl3 valve closed
12/3/2012	9:12:27 AM	PH3 valve closed
12/3/2012	9:12:27 AM	SiCl4 pre valve closed
12/3/2012	9:12:27 AM	SiCl4 post valve closed
12/3/2012	9:12:27 AM	Bypass valve closed
12/3/2012	9:12:27 AM	Bubbler valve closed
12/3/2012	9:12:27 AM	Helium valve opened
12/3/2012	9:12:27 AM	Main Vac valve opened
12/3/2012	9:12:27 AM	Helium MFC set to  20.000000
12/3/2012	9:12:27 AM	H2 MFC set to  0.000000
12/3/2012	9:12:27 AM	BCl3 MFC set to  0.000000
12/3/2012	9:12:27 AM	PH3 MFC set to  0.000000
12/3/2012	9:12:27 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:12:27 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:12:28 AM	Tube furnace set to 150
12/3/2012	9:12:58 AM	Helium valve closed
12/3/2012	9:12:58 AM	H2 valve closed
12/3/2012	9:12:58 AM	BCl3 valve closed
12/3/2012	9:12:58 AM	PH3 valve closed
12/3/2012	9:12:58 AM	SiCl4 pre valve closed
12/3/2012	9:12:58 AM	SiCl4 post valve closed
12/3/2012	9:12:58 AM	Bypass valve closed
12/3/2012	9:12:58 AM	Bubbler valve closed
12/3/2012	9:12:58 AM	Main Vac valve opened
12/3/2012	9:12:58 AM	Helium MFC set to  0.000000
12/3/2012	9:12:58 AM	H2 MFC set to  0.000000
12/3/2012	9:12:58 AM	BCl3 MFC set to  0.000000
12/3/2012	9:12:58 AM	PH3 MFC set to  0.000000
12/3/2012	9:12:58 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:12:58 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:12:58 AM	Tube furnace set to 150
12/3/2012	9:13:28 AM	H2 valve closed
12/3/2012	9:13:28 AM	BCl3 valve closed
12/3/2012	9:13:28 AM	PH3 valve closed
12/3/2012	9:13:28 AM	SiCl4 pre valve closed
12/3/2012	9:13:28 AM	SiCl4 post valve closed
12/3/2012	9:13:28 AM	Bypass valve closed
12/3/2012	9:13:28 AM	Bubbler valve closed
12/3/2012	9:13:28 AM	Helium valve opened
12/3/2012	9:13:28 AM	Main Vac valve opened
12/3/2012	9:13:28 AM	Helium MFC set to  20.000000
12/3/2012	9:13:28 AM	H2 MFC set to  0.000000
12/3/2012	9:13:28 AM	BCl3 MFC set to  0.000000
12/3/2012	9:13:28 AM	PH3 MFC set to  0.000000
12/3/2012	9:13:28 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:13:28 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:13:28 AM	Tube furnace set to 150
12/3/2012	9:13:58 AM	Helium valve closed
12/3/2012	9:13:58 AM	H2 valve closed
12/3/2012	9:13:58 AM	BCl3 valve closed
12/3/2012	9:13:58 AM	PH3 valve closed
12/3/2012	9:13:58 AM	SiCl4 pre valve closed
12/3/2012	9:13:58 AM	SiCl4 post valve closed
12/3/2012	9:13:58 AM	Bypass valve closed
12/3/2012	9:13:58 AM	Bubbler valve closed
12/3/2012	9:13:58 AM	Main Vac valve opened
12/3/2012	9:13:58 AM	Helium MFC set to  0.000000
12/3/2012	9:13:58 AM	H2 MFC set to  0.000000
12/3/2012	9:13:58 AM	BCl3 MFC set to  0.000000
12/3/2012	9:13:58 AM	PH3 MFC set to  0.000000
12/3/2012	9:13:58 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:13:58 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:13:58 AM	Tube furnace set to 150
12/3/2012	9:14:28 AM	H2 valve closed
12/3/2012	9:14:28 AM	BCl3 valve closed
12/3/2012	9:14:28 AM	PH3 valve closed
12/3/2012	9:14:28 AM	SiCl4 pre valve closed
12/3/2012	9:14:28 AM	SiCl4 post valve closed
12/3/2012	9:14:28 AM	Bypass valve closed
12/3/2012	9:14:28 AM	Bubbler valve closed
12/3/2012	9:14:28 AM	Helium valve opened
12/3/2012	9:14:28 AM	Main Vac valve opened
12/3/2012	9:14:28 AM	Helium MFC set to  20.000000
12/3/2012	9:14:28 AM	H2 MFC set to  0.000000
12/3/2012	9:14:28 AM	BCl3 MFC set to  0.000000
12/3/2012	9:14:28 AM	PH3 MFC set to  0.000000
12/3/2012	9:14:28 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:14:28 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:14:29 AM	Tube furnace set to 150
12/3/2012	9:14:59 AM	Helium valve closed
12/3/2012	9:14:59 AM	H2 valve closed
12/3/2012	9:14:59 AM	BCl3 valve closed
12/3/2012	9:14:59 AM	PH3 valve closed
12/3/2012	9:14:59 AM	SiCl4 pre valve closed
12/3/2012	9:14:59 AM	SiCl4 post valve closed
12/3/2012	9:14:59 AM	Bypass valve closed
12/3/2012	9:14:59 AM	Bubbler valve closed
12/3/2012	9:14:59 AM	Main Vac valve opened
12/3/2012	9:14:59 AM	Helium MFC set to  0.000000
12/3/2012	9:14:59 AM	H2 MFC set to  0.000000
12/3/2012	9:14:59 AM	BCl3 MFC set to  0.000000
12/3/2012	9:14:59 AM	PH3 MFC set to  0.000000
12/3/2012	9:14:59 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:14:59 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:14:59 AM	Tube furnace set to 150
12/3/2012	9:15:29 AM	H2 valve closed
12/3/2012	9:15:29 AM	BCl3 valve closed
12/3/2012	9:15:29 AM	PH3 valve closed
12/3/2012	9:15:29 AM	SiCl4 pre valve closed
12/3/2012	9:15:29 AM	SiCl4 post valve closed
12/3/2012	9:15:29 AM	Bypass valve closed
12/3/2012	9:15:29 AM	Bubbler valve closed
12/3/2012	9:15:29 AM	Helium valve opened
12/3/2012	9:15:29 AM	Main Vac valve opened
12/3/2012	9:15:29 AM	Helium MFC set to  20.000000
12/3/2012	9:15:29 AM	H2 MFC set to  0.000000
12/3/2012	9:15:29 AM	BCl3 MFC set to  0.000000
12/3/2012	9:15:29 AM	PH3 MFC set to  0.000000
12/3/2012	9:15:29 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:15:29 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:15:29 AM	Tube furnace set to 150
12/3/2012	9:15:59 AM	Helium valve closed
12/3/2012	9:15:59 AM	H2 valve closed
12/3/2012	9:15:59 AM	BCl3 valve closed
12/3/2012	9:15:59 AM	PH3 valve closed
12/3/2012	9:15:59 AM	SiCl4 pre valve closed
12/3/2012	9:15:59 AM	SiCl4 post valve closed
12/3/2012	9:15:59 AM	Bypass valve closed
12/3/2012	9:15:59 AM	Bubbler valve closed
12/3/2012	9:15:59 AM	Main Vac valve opened
12/3/2012	9:15:59 AM	Helium MFC set to  0.000000
12/3/2012	9:15:59 AM	H2 MFC set to  0.000000
12/3/2012	9:15:59 AM	BCl3 MFC set to  0.000000
12/3/2012	9:15:59 AM	PH3 MFC set to  0.000000
12/3/2012	9:15:59 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:15:59 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:15:59 AM	Tube furnace set to 150
12/3/2012	9:16:29 AM	H2 valve closed
12/3/2012	9:16:29 AM	BCl3 valve closed
12/3/2012	9:16:29 AM	PH3 valve closed
12/3/2012	9:16:29 AM	SiCl4 pre valve closed
12/3/2012	9:16:29 AM	SiCl4 post valve closed
12/3/2012	9:16:29 AM	Bypass valve closed
12/3/2012	9:16:29 AM	Bubbler valve closed
12/3/2012	9:16:29 AM	Helium valve opened
12/3/2012	9:16:29 AM	Main Vac valve opened
12/3/2012	9:16:29 AM	Helium MFC set to  20.000000
12/3/2012	9:16:29 AM	H2 MFC set to  0.000000
12/3/2012	9:16:29 AM	BCl3 MFC set to  0.000000
12/3/2012	9:16:29 AM	PH3 MFC set to  0.000000
12/3/2012	9:16:29 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:16:29 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:16:30 AM	Tube furnace set to 150
12/3/2012	9:17:00 AM	Helium valve closed
12/3/2012	9:17:00 AM	H2 valve closed
12/3/2012	9:17:00 AM	BCl3 valve closed
12/3/2012	9:17:00 AM	PH3 valve closed
12/3/2012	9:17:00 AM	SiCl4 pre valve closed
12/3/2012	9:17:00 AM	SiCl4 post valve closed
12/3/2012	9:17:00 AM	Bypass valve closed
12/3/2012	9:17:00 AM	Bubbler valve closed
12/3/2012	9:17:00 AM	Main Vac valve opened
12/3/2012	9:17:00 AM	Helium MFC set to  0.000000
12/3/2012	9:17:00 AM	H2 MFC set to  0.000000
12/3/2012	9:17:00 AM	BCl3 MFC set to  0.000000
12/3/2012	9:17:00 AM	PH3 MFC set to  0.000000
12/3/2012	9:17:00 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:17:00 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:17:00 AM	Tube furnace set to 150
12/3/2012	9:17:30 AM	H2 valve closed
12/3/2012	9:17:30 AM	BCl3 valve closed
12/3/2012	9:17:30 AM	PH3 valve closed
12/3/2012	9:17:30 AM	SiCl4 pre valve closed
12/3/2012	9:17:30 AM	SiCl4 post valve closed
12/3/2012	9:17:30 AM	Bypass valve closed
12/3/2012	9:17:30 AM	Bubbler valve closed
12/3/2012	9:17:30 AM	Helium valve opened
12/3/2012	9:17:30 AM	Main Vac valve opened
12/3/2012	9:17:30 AM	Helium MFC set to  20.000000
12/3/2012	9:17:30 AM	H2 MFC set to  0.000000
12/3/2012	9:17:30 AM	BCl3 MFC set to  0.000000
12/3/2012	9:17:30 AM	PH3 MFC set to  0.000000
12/3/2012	9:17:30 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:17:30 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:17:30 AM	Tube furnace set to 150
12/3/2012	9:18:00 AM	Helium valve closed
12/3/2012	9:18:00 AM	H2 valve closed
12/3/2012	9:18:00 AM	BCl3 valve closed
12/3/2012	9:18:00 AM	PH3 valve closed
12/3/2012	9:18:00 AM	SiCl4 pre valve closed
12/3/2012	9:18:00 AM	SiCl4 post valve closed
12/3/2012	9:18:00 AM	Bypass valve closed
12/3/2012	9:18:00 AM	Bubbler valve closed
12/3/2012	9:18:00 AM	Main Vac valve opened
12/3/2012	9:18:00 AM	Helium MFC set to  0.000000
12/3/2012	9:18:00 AM	H2 MFC set to  0.000000
12/3/2012	9:18:00 AM	BCl3 MFC set to  0.000000
12/3/2012	9:18:00 AM	PH3 MFC set to  0.000000
12/3/2012	9:18:00 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:18:00 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:18:00 AM	Tube furnace set to 150
12/3/2012	9:18:30 AM	H2 valve closed
12/3/2012	9:18:30 AM	BCl3 valve closed
12/3/2012	9:18:30 AM	PH3 valve closed
12/3/2012	9:18:30 AM	SiCl4 pre valve closed
12/3/2012	9:18:30 AM	SiCl4 post valve closed
12/3/2012	9:18:30 AM	Bypass valve closed
12/3/2012	9:18:30 AM	Bubbler valve closed
12/3/2012	9:18:30 AM	Helium valve opened
12/3/2012	9:18:30 AM	Main Vac valve opened
12/3/2012	9:18:30 AM	Helium MFC set to  20.000000
12/3/2012	9:18:30 AM	H2 MFC set to  0.000000
12/3/2012	9:18:30 AM	BCl3 MFC set to  0.000000
12/3/2012	9:18:30 AM	PH3 MFC set to  0.000000
12/3/2012	9:18:30 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:18:30 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:18:30 AM	Tube furnace set to 150
12/3/2012	9:19:00 AM	Helium valve closed
12/3/2012	9:19:00 AM	H2 valve closed
12/3/2012	9:19:01 AM	BCl3 valve closed
12/3/2012	9:19:01 AM	PH3 valve closed
12/3/2012	9:19:01 AM	SiCl4 pre valve closed
12/3/2012	9:19:01 AM	SiCl4 post valve closed
12/3/2012	9:19:01 AM	Bypass valve closed
12/3/2012	9:19:01 AM	Bubbler valve closed
12/3/2012	9:19:01 AM	Main Vac valve opened
12/3/2012	9:19:01 AM	Helium MFC set to  0.000000
12/3/2012	9:19:01 AM	H2 MFC set to  0.000000
12/3/2012	9:19:01 AM	BCl3 MFC set to  0.000000
12/3/2012	9:19:01 AM	PH3 MFC set to  0.000000
12/3/2012	9:19:01 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:19:01 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:19:01 AM	Tube furnace set to 150
12/3/2012	9:19:31 AM	H2 valve closed
12/3/2012	9:19:31 AM	BCl3 valve closed
12/3/2012	9:19:31 AM	PH3 valve closed
12/3/2012	9:19:31 AM	SiCl4 pre valve closed
12/3/2012	9:19:31 AM	SiCl4 post valve closed
12/3/2012	9:19:31 AM	Bypass valve closed
12/3/2012	9:19:31 AM	Bubbler valve closed
12/3/2012	9:19:31 AM	Helium valve opened
12/3/2012	9:19:31 AM	Main Vac valve opened
12/3/2012	9:19:31 AM	Helium MFC set to  20.000000
12/3/2012	9:19:31 AM	H2 MFC set to  0.000000
12/3/2012	9:19:31 AM	BCl3 MFC set to  0.000000
12/3/2012	9:19:31 AM	PH3 MFC set to  0.000000
12/3/2012	9:19:31 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:19:31 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:19:31 AM	Tube furnace set to 150
12/3/2012	9:20:01 AM	Helium valve closed
12/3/2012	9:20:01 AM	H2 valve closed
12/3/2012	9:20:01 AM	BCl3 valve closed
12/3/2012	9:20:01 AM	PH3 valve closed
12/3/2012	9:20:01 AM	SiCl4 pre valve closed
12/3/2012	9:20:01 AM	SiCl4 post valve closed
12/3/2012	9:20:01 AM	Bypass valve closed
12/3/2012	9:20:01 AM	Bubbler valve closed
12/3/2012	9:20:01 AM	Main Vac valve opened
12/3/2012	9:20:01 AM	Helium MFC set to  0.000000
12/3/2012	9:20:01 AM	H2 MFC set to  0.000000
12/3/2012	9:20:01 AM	BCl3 MFC set to  0.000000
12/3/2012	9:20:01 AM	PH3 MFC set to  0.000000
12/3/2012	9:20:01 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:20:01 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:20:01 AM	Tube furnace set to 150
12/3/2012	9:20:31 AM	H2 valve closed
12/3/2012	9:20:31 AM	BCl3 valve closed
12/3/2012	9:20:31 AM	PH3 valve closed
12/3/2012	9:20:31 AM	SiCl4 pre valve closed
12/3/2012	9:20:31 AM	SiCl4 post valve closed
12/3/2012	9:20:31 AM	Bypass valve closed
12/3/2012	9:20:31 AM	Bubbler valve closed
12/3/2012	9:20:31 AM	Helium valve opened
12/3/2012	9:20:31 AM	Main Vac valve opened
12/3/2012	9:20:31 AM	Helium MFC set to  20.000000
12/3/2012	9:20:31 AM	H2 MFC set to  0.000000
12/3/2012	9:20:31 AM	BCl3 MFC set to  0.000000
12/3/2012	9:20:31 AM	PH3 MFC set to  0.000000
12/3/2012	9:20:31 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:20:31 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:20:31 AM	Tube furnace set to 150
12/3/2012	9:21:01 AM	Helium valve closed
12/3/2012	9:21:01 AM	H2 valve closed
12/3/2012	9:21:01 AM	BCl3 valve closed
12/3/2012	9:21:01 AM	PH3 valve closed
12/3/2012	9:21:01 AM	SiCl4 pre valve closed
12/3/2012	9:21:02 AM	SiCl4 post valve closed
12/3/2012	9:21:02 AM	Bypass valve closed
12/3/2012	9:21:02 AM	Bubbler valve closed
12/3/2012	9:21:02 AM	Main Vac valve opened
12/3/2012	9:21:02 AM	Helium MFC set to  0.000000
12/3/2012	9:21:02 AM	H2 MFC set to  0.000000
12/3/2012	9:21:02 AM	BCl3 MFC set to  0.000000
12/3/2012	9:21:02 AM	PH3 MFC set to  0.000000
12/3/2012	9:21:02 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:21:02 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:21:02 AM	Tube furnace set to 150
12/3/2012	9:21:32 AM	H2 valve closed
12/3/2012	9:21:32 AM	BCl3 valve closed
12/3/2012	9:21:32 AM	PH3 valve closed
12/3/2012	9:21:32 AM	SiCl4 pre valve closed
12/3/2012	9:21:32 AM	SiCl4 post valve closed
12/3/2012	9:21:32 AM	Bypass valve closed
12/3/2012	9:21:32 AM	Bubbler valve closed
12/3/2012	9:21:32 AM	Helium valve opened
12/3/2012	9:21:32 AM	Main Vac valve opened
12/3/2012	9:21:32 AM	Helium MFC set to  20.000000
12/3/2012	9:21:32 AM	H2 MFC set to  0.000000
12/3/2012	9:21:32 AM	BCl3 MFC set to  0.000000
12/3/2012	9:21:32 AM	PH3 MFC set to  0.000000
12/3/2012	9:21:32 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:21:32 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:21:32 AM	Tube furnace set to 150
12/3/2012	9:22:02 AM	Helium valve closed
12/3/2012	9:22:02 AM	H2 valve closed
12/3/2012	9:22:02 AM	BCl3 valve closed
12/3/2012	9:22:02 AM	PH3 valve closed
12/3/2012	9:22:02 AM	SiCl4 pre valve closed
12/3/2012	9:22:02 AM	SiCl4 post valve closed
12/3/2012	9:22:02 AM	Bypass valve closed
12/3/2012	9:22:02 AM	Bubbler valve closed
12/3/2012	9:22:02 AM	Main Vac valve opened
12/3/2012	9:22:02 AM	Helium MFC set to  0.000000
12/3/2012	9:22:02 AM	H2 MFC set to  0.000000
12/3/2012	9:22:02 AM	BCl3 MFC set to  0.000000
12/3/2012	9:22:02 AM	PH3 MFC set to  0.000000
12/3/2012	9:22:02 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:22:02 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:22:02 AM	Tube furnace set to 150
12/3/2012	9:22:03 AM	Run finished at 9:22 AM
12/3/2012	9:24:55 AM	Main Vac valve closed
12/3/2012	9:25:10 AM	Main Vac valve opened
12/3/2012	9:25:40 AM	Recipe started at 9:25 AM
12/3/2012	9:25:40 AM	Helium valve closed
12/3/2012	9:25:40 AM	H2 valve closed
12/3/2012	9:25:40 AM	BCl3 valve closed
12/3/2012	9:25:40 AM	PH3 valve closed
12/3/2012	9:25:40 AM	SiCl4 pre valve closed
12/3/2012	9:25:40 AM	SiCl4 post valve closed
12/3/2012	9:25:40 AM	Bypass valve closed
12/3/2012	9:25:40 AM	Bubbler valve closed
12/3/2012	9:25:40 AM	Main Vac valve opened
12/3/2012	9:25:40 AM	Helium MFC set to  0.000000
12/3/2012	9:25:40 AM	H2 MFC set to  0.000000
12/3/2012	9:25:40 AM	BCl3 MFC set to  0.000000
12/3/2012	9:25:40 AM	PH3 MFC set to  0.000000
12/3/2012	9:25:40 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:25:40 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:25:40 AM	Tube furnace set to 150
12/3/2012	9:25:56 AM	H2 valve closed
12/3/2012	9:25:56 AM	BCl3 valve closed
12/3/2012	9:25:56 AM	PH3 valve closed
12/3/2012	9:25:56 AM	SiCl4 pre valve closed
12/3/2012	9:25:56 AM	SiCl4 post valve closed
12/3/2012	9:25:56 AM	Bypass valve closed
12/3/2012	9:25:56 AM	Bubbler valve closed
12/3/2012	9:25:56 AM	Helium valve opened
12/3/2012	9:25:56 AM	Main Vac valve opened
12/3/2012	9:25:56 AM	Helium MFC set to  20.000000
12/3/2012	9:25:56 AM	H2 MFC set to  0.000000
12/3/2012	9:25:56 AM	BCl3 MFC set to  0.000000
12/3/2012	9:25:56 AM	PH3 MFC set to  0.000000
12/3/2012	9:25:56 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:25:56 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:25:56 AM	Tube furnace set to 150
12/3/2012	9:26:26 AM	Helium valve closed
12/3/2012	9:26:26 AM	H2 valve closed
12/3/2012	9:26:26 AM	BCl3 valve closed
12/3/2012	9:26:27 AM	PH3 valve closed
12/3/2012	9:26:27 AM	SiCl4 pre valve closed
12/3/2012	9:26:27 AM	SiCl4 post valve closed
12/3/2012	9:26:27 AM	Bypass valve closed
12/3/2012	9:26:27 AM	Bubbler valve closed
12/3/2012	9:26:27 AM	Main Vac valve opened
12/3/2012	9:26:27 AM	Helium MFC set to  0.000000
12/3/2012	9:26:27 AM	H2 MFC set to  0.000000
12/3/2012	9:26:27 AM	BCl3 MFC set to  0.000000
12/3/2012	9:26:27 AM	PH3 MFC set to  0.000000
12/3/2012	9:26:27 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:26:27 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:26:27 AM	Tube furnace set to 150
12/3/2012	9:26:57 AM	H2 valve closed
12/3/2012	9:26:57 AM	BCl3 valve closed
12/3/2012	9:26:57 AM	PH3 valve closed
12/3/2012	9:26:57 AM	SiCl4 pre valve closed
12/3/2012	9:26:57 AM	SiCl4 post valve closed
12/3/2012	9:26:57 AM	Bypass valve closed
12/3/2012	9:26:57 AM	Bubbler valve closed
12/3/2012	9:26:57 AM	Helium valve opened
12/3/2012	9:26:57 AM	Main Vac valve opened
12/3/2012	9:26:57 AM	Helium MFC set to  20.000000
12/3/2012	9:26:57 AM	H2 MFC set to  0.000000
12/3/2012	9:26:57 AM	BCl3 MFC set to  0.000000
12/3/2012	9:26:57 AM	PH3 MFC set to  0.000000
12/3/2012	9:26:57 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:26:57 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:26:57 AM	Tube furnace set to 150
12/3/2012	9:27:27 AM	Helium valve closed
12/3/2012	9:27:27 AM	H2 valve closed
12/3/2012	9:27:27 AM	BCl3 valve closed
12/3/2012	9:27:27 AM	PH3 valve closed
12/3/2012	9:27:27 AM	SiCl4 pre valve closed
12/3/2012	9:27:27 AM	SiCl4 post valve closed
12/3/2012	9:27:27 AM	Bypass valve closed
12/3/2012	9:27:27 AM	Bubbler valve closed
12/3/2012	9:27:27 AM	Main Vac valve opened
12/3/2012	9:27:27 AM	Helium MFC set to  0.000000
12/3/2012	9:27:27 AM	H2 MFC set to  0.000000
12/3/2012	9:27:27 AM	BCl3 MFC set to  0.000000
12/3/2012	9:27:27 AM	PH3 MFC set to  0.000000
12/3/2012	9:27:27 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:27:27 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:27:27 AM	Tube furnace set to 150
12/3/2012	9:27:57 AM	H2 valve closed
12/3/2012	9:27:57 AM	BCl3 valve closed
12/3/2012	9:27:57 AM	PH3 valve closed
12/3/2012	9:27:57 AM	SiCl4 pre valve closed
12/3/2012	9:27:57 AM	SiCl4 post valve closed
12/3/2012	9:27:57 AM	Bypass valve closed
12/3/2012	9:27:57 AM	Bubbler valve closed
12/3/2012	9:27:57 AM	Helium valve opened
12/3/2012	9:27:57 AM	Main Vac valve opened
12/3/2012	9:27:57 AM	Helium MFC set to  20.000000
12/3/2012	9:27:57 AM	H2 MFC set to  0.000000
12/3/2012	9:27:57 AM	BCl3 MFC set to  0.000000
12/3/2012	9:27:57 AM	PH3 MFC set to  0.000000
12/3/2012	9:27:57 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:27:57 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:27:57 AM	Tube furnace set to 150
12/3/2012	9:28:27 AM	Helium valve closed
12/3/2012	9:28:27 AM	H2 valve closed
12/3/2012	9:28:27 AM	BCl3 valve closed
12/3/2012	9:28:27 AM	PH3 valve closed
12/3/2012	9:28:27 AM	SiCl4 pre valve closed
12/3/2012	9:28:27 AM	SiCl4 post valve closed
12/3/2012	9:28:27 AM	Bypass valve closed
12/3/2012	9:28:27 AM	Bubbler valve closed
12/3/2012	9:28:27 AM	Main Vac valve opened
12/3/2012	9:28:28 AM	Helium MFC set to  0.000000
12/3/2012	9:28:28 AM	H2 MFC set to  0.000000
12/3/2012	9:28:28 AM	BCl3 MFC set to  0.000000
12/3/2012	9:28:28 AM	PH3 MFC set to  0.000000
12/3/2012	9:28:28 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:28:28 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:28:28 AM	Tube furnace set to 150
12/3/2012	9:28:58 AM	H2 valve closed
12/3/2012	9:28:58 AM	BCl3 valve closed
12/3/2012	9:28:58 AM	PH3 valve closed
12/3/2012	9:28:58 AM	SiCl4 pre valve closed
12/3/2012	9:28:58 AM	SiCl4 post valve closed
12/3/2012	9:28:58 AM	Bypass valve closed
12/3/2012	9:28:58 AM	Bubbler valve closed
12/3/2012	9:28:58 AM	Helium valve opened
12/3/2012	9:28:58 AM	Main Vac valve opened
12/3/2012	9:28:58 AM	Helium MFC set to  20.000000
12/3/2012	9:28:58 AM	H2 MFC set to  0.000000
12/3/2012	9:28:58 AM	BCl3 MFC set to  0.000000
12/3/2012	9:28:58 AM	PH3 MFC set to  0.000000
12/3/2012	9:28:58 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:28:58 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:28:58 AM	Tube furnace set to 150
12/3/2012	9:29:28 AM	Helium valve closed
12/3/2012	9:29:28 AM	H2 valve closed
12/3/2012	9:29:28 AM	BCl3 valve closed
12/3/2012	9:29:28 AM	PH3 valve closed
12/3/2012	9:29:28 AM	SiCl4 pre valve closed
12/3/2012	9:29:28 AM	SiCl4 post valve closed
12/3/2012	9:29:28 AM	Bypass valve closed
12/3/2012	9:29:28 AM	Bubbler valve closed
12/3/2012	9:29:28 AM	Main Vac valve opened
12/3/2012	9:29:28 AM	Helium MFC set to  0.000000
12/3/2012	9:29:28 AM	H2 MFC set to  0.000000
12/3/2012	9:29:28 AM	BCl3 MFC set to  0.000000
12/3/2012	9:29:28 AM	PH3 MFC set to  0.000000
12/3/2012	9:29:28 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:29:28 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:29:28 AM	Tube furnace set to 150
12/3/2012	9:29:58 AM	H2 valve closed
12/3/2012	9:29:58 AM	BCl3 valve closed
12/3/2012	9:29:58 AM	PH3 valve closed
12/3/2012	9:29:58 AM	SiCl4 pre valve closed
12/3/2012	9:29:58 AM	SiCl4 post valve closed
12/3/2012	9:29:58 AM	Bypass valve closed
12/3/2012	9:29:58 AM	Bubbler valve closed
12/3/2012	9:29:58 AM	Helium valve opened
12/3/2012	9:29:58 AM	Main Vac valve opened
12/3/2012	9:29:58 AM	Helium MFC set to  20.000000
12/3/2012	9:29:58 AM	H2 MFC set to  0.000000
12/3/2012	9:29:58 AM	BCl3 MFC set to  0.000000
12/3/2012	9:29:58 AM	PH3 MFC set to  0.000000
12/3/2012	9:29:58 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:29:58 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:29:58 AM	Tube furnace set to 150
12/3/2012	9:30:28 AM	Helium valve closed
12/3/2012	9:30:28 AM	H2 valve closed
12/3/2012	9:30:28 AM	BCl3 valve closed
12/3/2012	9:30:28 AM	PH3 valve closed
12/3/2012	9:30:28 AM	SiCl4 pre valve closed
12/3/2012	9:30:28 AM	SiCl4 post valve closed
12/3/2012	9:30:28 AM	Bypass valve closed
12/3/2012	9:30:28 AM	Bubbler valve closed
12/3/2012	9:30:28 AM	Main Vac valve opened
12/3/2012	9:30:28 AM	Helium MFC set to  0.000000
12/3/2012	9:30:28 AM	H2 MFC set to  0.000000
12/3/2012	9:30:28 AM	BCl3 MFC set to  0.000000
12/3/2012	9:30:28 AM	PH3 MFC set to  0.000000
12/3/2012	9:30:28 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:30:28 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:30:29 AM	Tube furnace set to 150
12/3/2012	9:30:59 AM	H2 valve closed
12/3/2012	9:30:59 AM	BCl3 valve closed
12/3/2012	9:30:59 AM	PH3 valve closed
12/3/2012	9:30:59 AM	SiCl4 pre valve closed
12/3/2012	9:30:59 AM	SiCl4 post valve closed
12/3/2012	9:30:59 AM	Bypass valve closed
12/3/2012	9:30:59 AM	Bubbler valve closed
12/3/2012	9:30:59 AM	Helium valve opened
12/3/2012	9:30:59 AM	Main Vac valve opened
12/3/2012	9:30:59 AM	Helium MFC set to  20.000000
12/3/2012	9:30:59 AM	H2 MFC set to  0.000000
12/3/2012	9:30:59 AM	BCl3 MFC set to  0.000000
12/3/2012	9:30:59 AM	PH3 MFC set to  0.000000
12/3/2012	9:30:59 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:30:59 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:30:59 AM	Tube furnace set to 150
12/3/2012	9:31:29 AM	Helium valve closed
12/3/2012	9:31:29 AM	H2 valve closed
12/3/2012	9:31:29 AM	BCl3 valve closed
12/3/2012	9:31:29 AM	PH3 valve closed
12/3/2012	9:31:29 AM	SiCl4 pre valve closed
12/3/2012	9:31:29 AM	SiCl4 post valve closed
12/3/2012	9:31:29 AM	Bypass valve closed
12/3/2012	9:31:29 AM	Bubbler valve closed
12/3/2012	9:31:29 AM	Main Vac valve opened
12/3/2012	9:31:29 AM	Helium MFC set to  0.000000
12/3/2012	9:31:29 AM	H2 MFC set to  0.000000
12/3/2012	9:31:29 AM	BCl3 MFC set to  0.000000
12/3/2012	9:31:29 AM	PH3 MFC set to  0.000000
12/3/2012	9:31:29 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:31:29 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:31:29 AM	Tube furnace set to 150
12/3/2012	9:31:59 AM	H2 valve closed
12/3/2012	9:31:59 AM	BCl3 valve closed
12/3/2012	9:31:59 AM	PH3 valve closed
12/3/2012	9:31:59 AM	SiCl4 pre valve closed
12/3/2012	9:31:59 AM	SiCl4 post valve closed
12/3/2012	9:31:59 AM	Bypass valve closed
12/3/2012	9:31:59 AM	Bubbler valve closed
12/3/2012	9:31:59 AM	Helium valve opened
12/3/2012	9:31:59 AM	Main Vac valve opened
12/3/2012	9:31:59 AM	Helium MFC set to  20.000000
12/3/2012	9:31:59 AM	H2 MFC set to  0.000000
12/3/2012	9:31:59 AM	BCl3 MFC set to  0.000000
12/3/2012	9:31:59 AM	PH3 MFC set to  0.000000
12/3/2012	9:31:59 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:31:59 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:31:59 AM	Tube furnace set to 150
12/3/2012	9:32:29 AM	Helium valve closed
12/3/2012	9:32:29 AM	H2 valve closed
12/3/2012	9:32:29 AM	BCl3 valve closed
12/3/2012	9:32:29 AM	PH3 valve closed
12/3/2012	9:32:29 AM	SiCl4 pre valve closed
12/3/2012	9:32:29 AM	SiCl4 post valve closed
12/3/2012	9:32:29 AM	Bypass valve closed
12/3/2012	9:32:29 AM	Bubbler valve closed
12/3/2012	9:32:29 AM	Main Vac valve opened
12/3/2012	9:32:29 AM	Helium MFC set to  0.000000
12/3/2012	9:32:29 AM	H2 MFC set to  0.000000
12/3/2012	9:32:29 AM	BCl3 MFC set to  0.000000
12/3/2012	9:32:29 AM	PH3 MFC set to  0.000000
12/3/2012	9:32:29 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:32:29 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:32:30 AM	Tube furnace set to 150
12/3/2012	9:33:00 AM	H2 valve closed
12/3/2012	9:33:00 AM	BCl3 valve closed
12/3/2012	9:33:00 AM	PH3 valve closed
12/3/2012	9:33:00 AM	SiCl4 pre valve closed
12/3/2012	9:33:00 AM	SiCl4 post valve closed
12/3/2012	9:33:00 AM	Bypass valve closed
12/3/2012	9:33:00 AM	Bubbler valve closed
12/3/2012	9:33:00 AM	Helium valve opened
12/3/2012	9:33:00 AM	Main Vac valve opened
12/3/2012	9:33:00 AM	Helium MFC set to  20.000000
12/3/2012	9:33:00 AM	H2 MFC set to  0.000000
12/3/2012	9:33:00 AM	BCl3 MFC set to  0.000000
12/3/2012	9:33:00 AM	PH3 MFC set to  0.000000
12/3/2012	9:33:00 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:33:00 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:33:00 AM	Tube furnace set to 150
12/3/2012	9:33:30 AM	Helium valve closed
12/3/2012	9:33:30 AM	H2 valve closed
12/3/2012	9:33:30 AM	BCl3 valve closed
12/3/2012	9:33:30 AM	PH3 valve closed
12/3/2012	9:33:30 AM	SiCl4 pre valve closed
12/3/2012	9:33:30 AM	SiCl4 post valve closed
12/3/2012	9:33:30 AM	Bypass valve closed
12/3/2012	9:33:30 AM	Bubbler valve closed
12/3/2012	9:33:30 AM	Main Vac valve opened
12/3/2012	9:33:30 AM	Helium MFC set to  0.000000
12/3/2012	9:33:30 AM	H2 MFC set to  0.000000
12/3/2012	9:33:30 AM	BCl3 MFC set to  0.000000
12/3/2012	9:33:30 AM	PH3 MFC set to  0.000000
12/3/2012	9:33:30 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:33:30 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:33:30 AM	Tube furnace set to 150
12/3/2012	9:34:00 AM	H2 valve closed
12/3/2012	9:34:00 AM	BCl3 valve closed
12/3/2012	9:34:00 AM	PH3 valve closed
12/3/2012	9:34:00 AM	SiCl4 pre valve closed
12/3/2012	9:34:00 AM	SiCl4 post valve closed
12/3/2012	9:34:00 AM	Bypass valve closed
12/3/2012	9:34:00 AM	Bubbler valve closed
12/3/2012	9:34:00 AM	Helium valve opened
12/3/2012	9:34:00 AM	Main Vac valve opened
12/3/2012	9:34:00 AM	Helium MFC set to  20.000000
12/3/2012	9:34:00 AM	H2 MFC set to  0.000000
12/3/2012	9:34:00 AM	BCl3 MFC set to  0.000000
12/3/2012	9:34:00 AM	PH3 MFC set to  0.000000
12/3/2012	9:34:00 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:34:00 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:34:00 AM	Tube furnace set to 150
12/3/2012	9:34:30 AM	Helium valve closed
12/3/2012	9:34:30 AM	H2 valve closed
12/3/2012	9:34:30 AM	BCl3 valve closed
12/3/2012	9:34:30 AM	PH3 valve closed
12/3/2012	9:34:30 AM	SiCl4 pre valve closed
12/3/2012	9:34:30 AM	SiCl4 post valve closed
12/3/2012	9:34:30 AM	Bypass valve closed
12/3/2012	9:34:30 AM	Bubbler valve closed
12/3/2012	9:34:30 AM	Main Vac valve opened
12/3/2012	9:34:30 AM	Helium MFC set to  0.000000
12/3/2012	9:34:30 AM	H2 MFC set to  0.000000
12/3/2012	9:34:30 AM	BCl3 MFC set to  0.000000
12/3/2012	9:34:30 AM	PH3 MFC set to  0.000000
12/3/2012	9:34:30 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:34:30 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:34:31 AM	Tube furnace set to 150
12/3/2012	9:35:01 AM	H2 valve closed
12/3/2012	9:35:01 AM	BCl3 valve closed
12/3/2012	9:35:01 AM	PH3 valve closed
12/3/2012	9:35:01 AM	SiCl4 pre valve closed
12/3/2012	9:35:01 AM	SiCl4 post valve closed
12/3/2012	9:35:01 AM	Bypass valve closed
12/3/2012	9:35:01 AM	Bubbler valve closed
12/3/2012	9:35:01 AM	Helium valve opened
12/3/2012	9:35:01 AM	Main Vac valve opened
12/3/2012	9:35:01 AM	Helium MFC set to  20.000000
12/3/2012	9:35:01 AM	H2 MFC set to  0.000000
12/3/2012	9:35:01 AM	BCl3 MFC set to  0.000000
12/3/2012	9:35:01 AM	PH3 MFC set to  0.000000
12/3/2012	9:35:01 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:35:01 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:35:01 AM	Tube furnace set to 150
12/3/2012	9:35:31 AM	Helium valve closed
12/3/2012	9:35:31 AM	H2 valve closed
12/3/2012	9:35:31 AM	BCl3 valve closed
12/3/2012	9:35:31 AM	PH3 valve closed
12/3/2012	9:35:31 AM	SiCl4 pre valve closed
12/3/2012	9:35:31 AM	SiCl4 post valve closed
12/3/2012	9:35:31 AM	Bypass valve closed
12/3/2012	9:35:31 AM	Bubbler valve closed
12/3/2012	9:35:31 AM	Main Vac valve opened
12/3/2012	9:35:31 AM	Helium MFC set to  0.000000
12/3/2012	9:35:31 AM	H2 MFC set to  0.000000
12/3/2012	9:35:31 AM	BCl3 MFC set to  0.000000
12/3/2012	9:35:31 AM	PH3 MFC set to  0.000000
12/3/2012	9:35:31 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:35:31 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:35:31 AM	Tube furnace set to 150
12/3/2012	9:35:32 AM	Run finished at 9:35 AM
12/3/2012	9:58:36 AM	Main Vac valve closed
12/3/2012	9:58:51 AM	Main Vac valve opened
12/3/2012	9:58:55 AM	Helium MFC set to  20.000000
12/3/2012	9:58:57 AM	Helium valve opened
12/3/2012	9:59:18 AM	Helium valve closed
12/3/2012	9:59:58 AM	Recipe started at 9:59 AM
12/3/2012	9:59:58 AM	Helium valve closed
12/3/2012	9:59:58 AM	H2 valve closed
12/3/2012	9:59:58 AM	BCl3 valve closed
12/3/2012	9:59:58 AM	PH3 valve closed
12/3/2012	9:59:58 AM	SiCl4 pre valve closed
12/3/2012	9:59:58 AM	SiCl4 post valve closed
12/3/2012	9:59:59 AM	Main Vac valve closed
12/3/2012	9:59:59 AM	Bypass valve closed
12/3/2012	9:59:59 AM	Bubbler valve closed
12/3/2012	9:59:59 AM	Helium MFC set to  0.000000
12/3/2012	9:59:59 AM	H2 MFC set to  0.000000
12/3/2012	9:59:59 AM	BCl3 MFC set to  0.000000
12/3/2012	9:59:59 AM	PH3 MFC set to  0.000000
12/3/2012	9:59:59 AM	SiCl4 MFC set to  0.000000
12/3/2012	9:59:59 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	9:59:59 AM	Tube furnace set to 0
12/3/2012	10:00:02 AM	Helium valve closed
12/3/2012	10:00:02 AM	BCl3 valve closed
12/3/2012	10:00:02 AM	PH3 valve closed
12/3/2012	10:00:02 AM	SiCl4 pre valve closed
12/3/2012	10:00:02 AM	SiCl4 post valve closed
12/3/2012	10:00:02 AM	Main Vac valve closed
12/3/2012	10:00:02 AM	Bypass valve closed
12/3/2012	10:00:02 AM	Bubbler valve closed
12/3/2012	10:00:02 AM	H2 valve opened
12/3/2012	10:00:02 AM	Helium MFC set to  0.000000
12/3/2012	10:00:02 AM	H2 MFC set to  500.000000
12/3/2012	10:00:02 AM	BCl3 MFC set to  0.000000
12/3/2012	10:00:02 AM	PH3 MFC set to  0.000000
12/3/2012	10:00:02 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:00:02 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:00:02 AM	Tube furnace set to 0
12/3/2012	10:01:14 AM	Helium valve closed
12/3/2012	10:01:14 AM	BCl3 valve closed
12/3/2012	10:01:14 AM	PH3 valve closed
12/3/2012	10:01:14 AM	SiCl4 pre valve closed
12/3/2012	10:01:14 AM	SiCl4 post valve closed
12/3/2012	10:01:14 AM	Main Vac valve closed
12/3/2012	10:01:14 AM	Bypass valve closed
12/3/2012	10:01:14 AM	H2 valve opened
12/3/2012	10:01:14 AM	Bubbler valve opened
12/3/2012	10:01:14 AM	Helium MFC set to  0.000000
12/3/2012	10:01:14 AM	H2 MFC set to  500.000000
12/3/2012	10:01:14 AM	BCl3 MFC set to  0.000000
12/3/2012	10:01:14 AM	PH3 MFC set to  0.000000
12/3/2012	10:01:14 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:01:14 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:01:14 AM	Tube furnace set to 0
12/3/2012	10:01:15 AM	Helium valve closed
12/3/2012	10:01:15 AM	BCl3 valve closed
12/3/2012	10:01:15 AM	PH3 valve closed
12/3/2012	10:01:15 AM	SiCl4 pre valve closed
12/3/2012	10:01:15 AM	SiCl4 post valve closed
12/3/2012	10:01:15 AM	Main Vac valve closed
12/3/2012	10:01:15 AM	Bypass valve closed
12/3/2012	10:01:15 AM	H2 valve opened
12/3/2012	10:01:15 AM	Bubbler valve opened
12/3/2012	10:01:15 AM	Helium MFC set to  0.000000
12/3/2012	10:01:15 AM	H2 MFC set to  500.000000
12/3/2012	10:01:15 AM	BCl3 MFC set to  0.000000
12/3/2012	10:01:15 AM	PH3 MFC set to  0.000000
12/3/2012	10:01:15 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:01:15 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:01:15 AM	Tube furnace set to 1000
12/3/2012	10:21:15 AM	Helium valve closed
12/3/2012	10:21:15 AM	PH3 valve closed
12/3/2012	10:21:15 AM	Main Vac valve closed
12/3/2012	10:21:15 AM	Bypass valve closed
12/3/2012	10:21:15 AM	H2 valve opened
12/3/2012	10:21:15 AM	BCl3 valve opened
12/3/2012	10:21:15 AM	SiCl4 pre valve opened
12/3/2012	10:21:15 AM	SiCl4 post valve opened
12/3/2012	10:21:15 AM	Bubbler valve opened
12/3/2012	10:21:15 AM	Helium MFC set to  0.000000
12/3/2012	10:21:15 AM	H2 MFC set to  450.000000
12/3/2012	10:21:15 AM	BCl3 MFC set to  1.300000
12/3/2012	10:21:15 AM	PH3 MFC set to  0.000000
12/3/2012	10:21:15 AM	SiCl4 MFC set to  50.000000
12/3/2012	10:21:15 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:21:15 AM	Tube furnace set to 1000
12/3/2012	10:36:15 AM	Helium valve closed
12/3/2012	10:36:15 AM	BCl3 valve closed
12/3/2012	10:36:15 AM	Main Vac valve closed
12/3/2012	10:36:15 AM	Bypass valve closed
12/3/2012	10:36:15 AM	H2 valve opened
12/3/2012	10:36:15 AM	PH3 valve opened
12/3/2012	10:36:15 AM	SiCl4 pre valve opened
12/3/2012	10:36:15 AM	SiCl4 post valve opened
12/3/2012	10:36:15 AM	Bubbler valve opened
12/3/2012	10:36:15 AM	Helium MFC set to  0.000000
12/3/2012	10:36:15 AM	H2 MFC set to  450.000000
12/3/2012	10:36:15 AM	BCl3 MFC set to  0.000000
12/3/2012	10:36:15 AM	PH3 MFC set to  20.000000
12/3/2012	10:36:15 AM	SiCl4 MFC set to  50.000000
12/3/2012	10:36:15 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:36:16 AM	Tube furnace set to 1000
12/3/2012	10:41:16 AM	Helium valve closed
12/3/2012	10:41:16 AM	BCl3 valve closed
12/3/2012	10:41:16 AM	PH3 valve closed
12/3/2012	10:41:16 AM	SiCl4 pre valve closed
12/3/2012	10:41:16 AM	SiCl4 post valve closed
12/3/2012	10:41:16 AM	Main Vac valve closed
12/3/2012	10:41:16 AM	Bypass valve closed
12/3/2012	10:41:16 AM	H2 valve opened
12/3/2012	10:41:16 AM	Bubbler valve opened
12/3/2012	10:41:16 AM	Helium MFC set to  0.000000
12/3/2012	10:41:16 AM	H2 MFC set to  500.000000
12/3/2012	10:41:16 AM	BCl3 MFC set to  0.000000
12/3/2012	10:41:16 AM	PH3 MFC set to  0.000000
12/3/2012	10:41:16 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:41:16 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:41:16 AM	Tube furnace set to 950
12/3/2012	10:44:16 AM	Helium valve closed
12/3/2012	10:44:16 AM	BCl3 valve closed
12/3/2012	10:44:16 AM	PH3 valve closed
12/3/2012	10:44:16 AM	SiCl4 pre valve closed
12/3/2012	10:44:16 AM	SiCl4 post valve closed
12/3/2012	10:44:16 AM	Main Vac valve closed
12/3/2012	10:44:16 AM	Bypass valve closed
12/3/2012	10:44:16 AM	H2 valve opened
12/3/2012	10:44:16 AM	Bubbler valve opened
12/3/2012	10:44:16 AM	Helium MFC set to  0.000000
12/3/2012	10:44:16 AM	H2 MFC set to  500.000000
12/3/2012	10:44:16 AM	BCl3 MFC set to  0.000000
12/3/2012	10:44:16 AM	PH3 MFC set to  0.000000
12/3/2012	10:44:16 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:44:16 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:44:16 AM	Tube furnace set to 900
12/3/2012	10:47:16 AM	Helium valve closed
12/3/2012	10:47:16 AM	BCl3 valve closed
12/3/2012	10:47:16 AM	PH3 valve closed
12/3/2012	10:47:16 AM	SiCl4 pre valve closed
12/3/2012	10:47:16 AM	SiCl4 post valve closed
12/3/2012	10:47:16 AM	Main Vac valve closed
12/3/2012	10:47:16 AM	Bypass valve closed
12/3/2012	10:47:16 AM	H2 valve opened
12/3/2012	10:47:16 AM	Bubbler valve opened
12/3/2012	10:47:16 AM	Helium MFC set to  0.000000
12/3/2012	10:47:16 AM	H2 MFC set to  500.000000
12/3/2012	10:47:16 AM	BCl3 MFC set to  0.000000
12/3/2012	10:47:16 AM	PH3 MFC set to  0.000000
12/3/2012	10:47:16 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:47:16 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:47:16 AM	Tube furnace set to 850
12/3/2012	10:50:16 AM	Helium valve closed
12/3/2012	10:50:16 AM	BCl3 valve closed
12/3/2012	10:50:16 AM	PH3 valve closed
12/3/2012	10:50:16 AM	SiCl4 pre valve closed
12/3/2012	10:50:16 AM	SiCl4 post valve closed
12/3/2012	10:50:16 AM	Main Vac valve closed
12/3/2012	10:50:16 AM	Bypass valve closed
12/3/2012	10:50:16 AM	H2 valve opened
12/3/2012	10:50:16 AM	Bubbler valve opened
12/3/2012	10:50:16 AM	Helium MFC set to  0.000000
12/3/2012	10:50:16 AM	H2 MFC set to  500.000000
12/3/2012	10:50:16 AM	BCl3 MFC set to  0.000000
12/3/2012	10:50:16 AM	PH3 MFC set to  0.000000
12/3/2012	10:50:16 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:50:16 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:50:16 AM	Tube furnace set to 800
12/3/2012	10:53:17 AM	Helium valve closed
12/3/2012	10:53:17 AM	BCl3 valve closed
12/3/2012	10:53:17 AM	PH3 valve closed
12/3/2012	10:53:17 AM	SiCl4 pre valve closed
12/3/2012	10:53:17 AM	SiCl4 post valve closed
12/3/2012	10:53:17 AM	Main Vac valve closed
12/3/2012	10:53:17 AM	Bypass valve closed
12/3/2012	10:53:17 AM	H2 valve opened
12/3/2012	10:53:17 AM	Bubbler valve opened
12/3/2012	10:53:17 AM	Helium MFC set to  0.000000
12/3/2012	10:53:17 AM	H2 MFC set to  500.000000
12/3/2012	10:53:17 AM	BCl3 MFC set to  0.000000
12/3/2012	10:53:17 AM	PH3 MFC set to  0.000000
12/3/2012	10:53:17 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:53:17 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:53:17 AM	Tube furnace set to 750
12/3/2012	10:56:17 AM	H2 valve closed
12/3/2012	10:56:17 AM	BCl3 valve closed
12/3/2012	10:56:17 AM	PH3 valve closed
12/3/2012	10:56:17 AM	SiCl4 pre valve closed
12/3/2012	10:56:17 AM	SiCl4 post valve closed
12/3/2012	10:56:17 AM	Main Vac valve closed
12/3/2012	10:56:17 AM	Bypass valve closed
12/3/2012	10:56:17 AM	Helium valve opened
12/3/2012	10:56:17 AM	Bubbler valve opened
12/3/2012	10:56:17 AM	Helium MFC set to  500.000000
12/3/2012	10:56:17 AM	H2 MFC set to  0.000000
12/3/2012	10:56:17 AM	BCl3 MFC set to  0.000000
12/3/2012	10:56:17 AM	PH3 MFC set to  0.000000
12/3/2012	10:56:17 AM	SiCl4 MFC set to  0.000000
12/3/2012	10:56:17 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	10:56:17 AM	Tube furnace set to 0
12/3/2012	11:02:19 AM	Run aborted at 11:02 AM
12/3/2012	11:02:19 AM	Helium valve closed
12/3/2012	11:02:19 AM	H2 valve closed
12/3/2012	11:02:19 AM	BCl3 valve closed
12/3/2012	11:02:19 AM	PH3 valve closed
12/3/2012	11:02:19 AM	SiCl4 pre valve closed
12/3/2012	11:02:19 AM	SiCl4 post valve closed
12/3/2012	11:02:19 AM	Bypass valve closed
12/3/2012	11:02:19 AM	Main Vac valve closed
12/3/2012	11:02:19 AM	Bubbler valve closed
12/3/2012	11:02:19 AM	Helium MFC set to  0.000000
12/3/2012	11:02:19 AM	H2 MFC set to  0.000000
12/3/2012	11:02:19 AM	BCl3 MFC set to  0.000000
12/3/2012	11:02:19 AM	PH3 MFC set to  0.000000
12/3/2012	11:02:19 AM	SiCl4 MFC set to  0.000000
12/3/2012	11:02:19 AM	Tube furnace set to 0
12/3/2012	11:10:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	11:10:22 AM	Recipe started at 11:10 AM
12/3/2012	11:10:22 AM	Helium valve closed
12/3/2012	11:10:22 AM	H2 valve closed
12/3/2012	11:10:22 AM	BCl3 valve closed
12/3/2012	11:10:22 AM	PH3 valve closed
12/3/2012	11:10:22 AM	SiCl4 pre valve closed
12/3/2012	11:10:22 AM	SiCl4 post valve closed
12/3/2012	11:10:22 AM	Main Vac valve closed
12/3/2012	11:10:22 AM	Bubbler valve closed
12/3/2012	11:10:22 AM	Bypass valve opened
12/3/2012	11:10:22 AM	Helium MFC set to  0.000000
12/3/2012	11:10:22 AM	H2 MFC set to  0.000000
12/3/2012	11:10:22 AM	BCl3 MFC set to  0.000000
12/3/2012	11:10:22 AM	PH3 MFC set to  0.000000
12/3/2012	11:10:22 AM	SiCl4 MFC set to  0.000000
12/3/2012	11:10:22 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	11:10:22 AM	Tube furnace set to 0
12/3/2012	11:11:41 AM	Helium valve closed
12/3/2012	11:11:41 AM	H2 valve closed
12/3/2012	11:11:41 AM	BCl3 valve closed
12/3/2012	11:11:41 AM	PH3 valve closed
12/3/2012	11:11:41 AM	SiCl4 pre valve closed
12/3/2012	11:11:41 AM	SiCl4 post valve closed
12/3/2012	11:11:41 AM	Main Vac valve closed
12/3/2012	11:11:41 AM	Bubbler valve closed
12/3/2012	11:11:41 AM	Bypass valve opened
12/3/2012	11:11:41 AM	Helium MFC set to  0.000000
12/3/2012	11:11:41 AM	H2 MFC set to  0.000000
12/3/2012	11:11:41 AM	BCl3 MFC set to  0.000000
12/3/2012	11:11:41 AM	PH3 MFC set to  0.000000
12/3/2012	11:11:41 AM	SiCl4 MFC set to  0.000000
12/3/2012	11:11:41 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	11:11:41 AM	Tube furnace set to 0
12/3/2012	11:12:41 AM	Helium valve closed
12/3/2012	11:12:41 AM	H2 valve closed
12/3/2012	11:12:41 AM	BCl3 valve closed
12/3/2012	11:12:41 AM	PH3 valve closed
12/3/2012	11:12:41 AM	SiCl4 pre valve closed
12/3/2012	11:12:41 AM	SiCl4 post valve closed
12/3/2012	11:12:41 AM	Bypass valve closed
12/3/2012	11:12:41 AM	Bubbler valve closed
12/3/2012	11:12:41 AM	Main Vac valve opened
12/3/2012	11:12:41 AM	Helium MFC set to  0.000000
12/3/2012	11:12:41 AM	H2 MFC set to  0.000000
12/3/2012	11:12:41 AM	BCl3 MFC set to  0.000000
12/3/2012	11:12:41 AM	PH3 MFC set to  0.000000
12/3/2012	11:12:41 AM	SiCl4 MFC set to  0.000000
12/3/2012	11:12:41 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	11:12:41 AM	Tube furnace set to 0
12/3/2012	11:12:42 AM	Run finished at 11:12 AM
12/3/2012	11:12:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	11:15:55 AM	Recipe started at 11:15 AM
12/3/2012	11:15:55 AM	Helium valve closed
12/3/2012	11:15:55 AM	H2 valve closed
12/3/2012	11:15:55 AM	BCl3 valve closed
12/3/2012	11:15:55 AM	PH3 valve closed
12/3/2012	11:15:55 AM	SiCl4 pre valve closed
12/3/2012	11:15:55 AM	SiCl4 post valve closed
12/3/2012	11:15:55 AM	Bypass valve closed
12/3/2012	11:15:55 AM	Bubbler valve closed
12/3/2012	11:15:55 AM	Main Vac valve opened
12/3/2012	11:15:55 AM	Helium MFC set to  0.000000
12/3/2012	11:15:55 AM	H2 MFC set to  0.000000
12/3/2012	11:15:55 AM	BCl3 MFC set to  0.000000
12/3/2012	11:15:55 AM	PH3 MFC set to  0.000000
12/3/2012	11:15:55 AM	SiCl4 MFC set to  0.000000
12/3/2012	11:15:55 AM	Bypass solenoid MFC set to  0.000000
12/3/2012	11:15:55 AM	Tube furnace set to 150
12/3/2012	12:15:55 PM	H2 valve closed
12/3/2012	12:15:55 PM	BCl3 valve closed
12/3/2012	12:15:55 PM	PH3 valve closed
12/3/2012	12:15:55 PM	SiCl4 pre valve closed
12/3/2012	12:15:55 PM	SiCl4 post valve closed
12/3/2012	12:15:55 PM	Bypass valve closed
12/3/2012	12:15:55 PM	Bubbler valve closed
12/3/2012	12:15:55 PM	Helium valve opened
12/3/2012	12:15:55 PM	Main Vac valve opened
12/3/2012	12:15:55 PM	Helium MFC set to  20.000000
12/3/2012	12:15:55 PM	H2 MFC set to  0.000000
12/3/2012	12:15:55 PM	BCl3 MFC set to  0.000000
12/3/2012	12:15:55 PM	PH3 MFC set to  0.000000
12/3/2012	12:15:55 PM	SiCl4 MFC set to  0.000000
12/3/2012	12:15:55 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	12:15:55 PM	Tube furnace set to 150
12/3/2012	12:16:55 PM	Helium valve closed
12/3/2012	12:16:55 PM	H2 valve closed
12/3/2012	12:16:55 PM	BCl3 valve closed
12/3/2012	12:16:55 PM	PH3 valve closed
12/3/2012	12:16:55 PM	SiCl4 pre valve closed
12/3/2012	12:16:55 PM	SiCl4 post valve closed
12/3/2012	12:16:55 PM	Bypass valve closed
12/3/2012	12:16:55 PM	Bubbler valve closed
12/3/2012	12:16:55 PM	Main Vac valve opened
12/3/2012	12:16:55 PM	Helium MFC set to  0.000000
12/3/2012	12:16:55 PM	H2 MFC set to  0.000000
12/3/2012	12:16:55 PM	BCl3 MFC set to  0.000000
12/3/2012	12:16:55 PM	PH3 MFC set to  0.000000
12/3/2012	12:16:55 PM	SiCl4 MFC set to  0.000000
12/3/2012	12:16:55 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	12:16:55 PM	Tube furnace set to 150
12/3/2012	1:16:55 PM	H2 valve closed
12/3/2012	1:16:55 PM	BCl3 valve closed
12/3/2012	1:16:55 PM	PH3 valve closed
12/3/2012	1:16:55 PM	SiCl4 pre valve closed
12/3/2012	1:16:55 PM	SiCl4 post valve closed
12/3/2012	1:16:55 PM	Bypass valve closed
12/3/2012	1:16:55 PM	Bubbler valve closed
12/3/2012	1:16:55 PM	Helium valve opened
12/3/2012	1:16:55 PM	Main Vac valve opened
12/3/2012	1:16:55 PM	Helium MFC set to  20.000000
12/3/2012	1:16:55 PM	H2 MFC set to  0.000000
12/3/2012	1:16:55 PM	BCl3 MFC set to  0.000000
12/3/2012	1:16:55 PM	PH3 MFC set to  0.000000
12/3/2012	1:16:55 PM	SiCl4 MFC set to  0.000000
12/3/2012	1:16:55 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:16:56 PM	Tube furnace set to 150
12/3/2012	1:17:56 PM	Helium valve closed
12/3/2012	1:17:56 PM	H2 valve closed
12/3/2012	1:17:56 PM	BCl3 valve closed
12/3/2012	1:17:56 PM	PH3 valve closed
12/3/2012	1:17:56 PM	SiCl4 pre valve closed
12/3/2012	1:17:56 PM	SiCl4 post valve closed
12/3/2012	1:17:56 PM	Bypass valve closed
12/3/2012	1:17:56 PM	Bubbler valve closed
12/3/2012	1:17:56 PM	Main Vac valve opened
12/3/2012	1:17:56 PM	Helium MFC set to  0.000000
12/3/2012	1:17:56 PM	H2 MFC set to  0.000000
12/3/2012	1:17:56 PM	BCl3 MFC set to  0.000000
12/3/2012	1:17:56 PM	PH3 MFC set to  0.000000
12/3/2012	1:17:56 PM	SiCl4 MFC set to  0.000000
12/3/2012	1:17:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:17:56 PM	Tube furnace set to 150
12/3/2012	1:18:56 PM	Helium valve closed
12/3/2012	1:18:56 PM	H2 valve closed
12/3/2012	1:18:56 PM	BCl3 valve closed
12/3/2012	1:18:56 PM	PH3 valve closed
12/3/2012	1:18:56 PM	SiCl4 pre valve closed
12/3/2012	1:18:56 PM	SiCl4 post valve closed
12/3/2012	1:18:56 PM	Main Vac valve closed
12/3/2012	1:18:56 PM	Bypass valve closed
12/3/2012	1:18:56 PM	Bubbler valve closed
12/3/2012	1:18:56 PM	Helium MFC set to  0.000000
12/3/2012	1:18:56 PM	H2 MFC set to  0.000000
12/3/2012	1:18:56 PM	BCl3 MFC set to  0.000000
12/3/2012	1:18:56 PM	PH3 MFC set to  0.000000
12/3/2012	1:18:56 PM	SiCl4 MFC set to  0.000000
12/3/2012	1:18:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:18:56 PM	Tube furnace set to 150
12/3/2012	1:18:59 PM	Helium valve closed
12/3/2012	1:18:59 PM	BCl3 valve closed
12/3/2012	1:18:59 PM	PH3 valve closed
12/3/2012	1:18:59 PM	SiCl4 pre valve closed
12/3/2012	1:18:59 PM	SiCl4 post valve closed
12/3/2012	1:18:59 PM	Main Vac valve closed
12/3/2012	1:18:59 PM	Bypass valve closed
12/3/2012	1:18:59 PM	Bubbler valve closed
12/3/2012	1:18:59 PM	H2 valve opened
12/3/2012	1:18:59 PM	Helium MFC set to  0.000000
12/3/2012	1:18:59 PM	H2 MFC set to  500.000000
12/3/2012	1:18:59 PM	BCl3 MFC set to  0.000000
12/3/2012	1:18:59 PM	PH3 MFC set to  0.000000
12/3/2012	1:18:59 PM	SiCl4 MFC set to  0.000000
12/3/2012	1:18:59 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:18:59 PM	Tube furnace set to 150
12/3/2012	1:20:11 PM	Helium valve closed
12/3/2012	1:20:11 PM	BCl3 valve closed
12/3/2012	1:20:11 PM	PH3 valve closed
12/3/2012	1:20:11 PM	SiCl4 pre valve closed
12/3/2012	1:20:11 PM	SiCl4 post valve closed
12/3/2012	1:20:11 PM	Main Vac valve closed
12/3/2012	1:20:11 PM	Bypass valve closed
12/3/2012	1:20:11 PM	H2 valve opened
12/3/2012	1:20:11 PM	Bubbler valve opened
12/3/2012	1:20:11 PM	Helium MFC set to  0.000000
12/3/2012	1:20:11 PM	H2 MFC set to  500.000000
12/3/2012	1:20:11 PM	BCl3 MFC set to  0.000000
12/3/2012	1:20:11 PM	PH3 MFC set to  0.000000
12/3/2012	1:20:11 PM	SiCl4 MFC set to  0.000000
12/3/2012	1:20:11 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:20:11 PM	Tube furnace set to 150
12/3/2012	1:20:12 PM	Helium valve closed
12/3/2012	1:20:12 PM	BCl3 valve closed
12/3/2012	1:20:12 PM	PH3 valve closed
12/3/2012	1:20:12 PM	SiCl4 pre valve closed
12/3/2012	1:20:13 PM	SiCl4 post valve closed
12/3/2012	1:20:13 PM	Main Vac valve closed
12/3/2012	1:20:13 PM	Bypass valve closed
12/3/2012	1:20:13 PM	H2 valve opened
12/3/2012	1:20:13 PM	Bubbler valve opened
12/3/2012	1:20:13 PM	Helium MFC set to  0.000000
12/3/2012	1:20:13 PM	H2 MFC set to  500.000000
12/3/2012	1:20:13 PM	BCl3 MFC set to  0.000000
12/3/2012	1:20:13 PM	PH3 MFC set to  0.000000
12/3/2012	1:20:13 PM	SiCl4 MFC set to  0.000000
12/3/2012	1:20:13 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:20:13 PM	Tube furnace set to 1000
12/3/2012	1:40:13 PM	Helium valve closed
12/3/2012	1:40:13 PM	PH3 valve closed
12/3/2012	1:40:13 PM	Main Vac valve closed
12/3/2012	1:40:13 PM	Bypass valve closed
12/3/2012	1:40:13 PM	H2 valve opened
12/3/2012	1:40:13 PM	BCl3 valve opened
12/3/2012	1:40:13 PM	SiCl4 pre valve opened
12/3/2012	1:40:13 PM	SiCl4 post valve opened
12/3/2012	1:40:13 PM	Bubbler valve opened
12/3/2012	1:40:13 PM	Helium MFC set to  0.000000
12/3/2012	1:40:13 PM	H2 MFC set to  450.000000
12/3/2012	1:40:13 PM	BCl3 MFC set to  1.300000
12/3/2012	1:40:13 PM	PH3 MFC set to  0.000000
12/3/2012	1:40:13 PM	SiCl4 MFC set to  50.000000
12/3/2012	1:40:13 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	1:40:13 PM	Tube furnace set to 1000
12/3/2012	2:00:13 PM	Helium valve closed
12/3/2012	2:00:13 PM	BCl3 valve closed
12/3/2012	2:00:13 PM	PH3 valve closed
12/3/2012	2:00:13 PM	SiCl4 pre valve closed
12/3/2012	2:00:13 PM	SiCl4 post valve closed
12/3/2012	2:00:13 PM	Main Vac valve closed
12/3/2012	2:00:13 PM	Bypass valve closed
12/3/2012	2:00:13 PM	H2 valve opened
12/3/2012	2:00:13 PM	Bubbler valve opened
12/3/2012	2:00:13 PM	Helium MFC set to  0.000000
12/3/2012	2:00:13 PM	H2 MFC set to  500.000000
12/3/2012	2:00:13 PM	BCl3 MFC set to  0.000000
12/3/2012	2:00:13 PM	PH3 MFC set to  0.000000
12/3/2012	2:00:13 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:00:13 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:00:13 PM	Tube furnace set to 950
12/3/2012	2:03:13 PM	Helium valve closed
12/3/2012	2:03:13 PM	BCl3 valve closed
12/3/2012	2:03:13 PM	PH3 valve closed
12/3/2012	2:03:13 PM	SiCl4 pre valve closed
12/3/2012	2:03:13 PM	SiCl4 post valve closed
12/3/2012	2:03:13 PM	Main Vac valve closed
12/3/2012	2:03:13 PM	Bypass valve closed
12/3/2012	2:03:13 PM	H2 valve opened
12/3/2012	2:03:13 PM	Bubbler valve opened
12/3/2012	2:03:13 PM	Helium MFC set to  0.000000
12/3/2012	2:03:13 PM	H2 MFC set to  500.000000
12/3/2012	2:03:13 PM	BCl3 MFC set to  0.000000
12/3/2012	2:03:13 PM	PH3 MFC set to  0.000000
12/3/2012	2:03:13 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:03:13 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:03:13 PM	Tube furnace set to 900
12/3/2012	2:06:13 PM	Helium valve closed
12/3/2012	2:06:13 PM	BCl3 valve closed
12/3/2012	2:06:13 PM	PH3 valve closed
12/3/2012	2:06:13 PM	SiCl4 pre valve closed
12/3/2012	2:06:13 PM	SiCl4 post valve closed
12/3/2012	2:06:13 PM	Main Vac valve closed
12/3/2012	2:06:13 PM	Bypass valve closed
12/3/2012	2:06:13 PM	H2 valve opened
12/3/2012	2:06:13 PM	Bubbler valve opened
12/3/2012	2:06:13 PM	Helium MFC set to  0.000000
12/3/2012	2:06:13 PM	H2 MFC set to  500.000000
12/3/2012	2:06:13 PM	BCl3 MFC set to  0.000000
12/3/2012	2:06:13 PM	PH3 MFC set to  0.000000
12/3/2012	2:06:13 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:06:13 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:06:14 PM	Tube furnace set to 850
12/3/2012	2:09:14 PM	Helium valve closed
12/3/2012	2:09:14 PM	BCl3 valve closed
12/3/2012	2:09:14 PM	PH3 valve closed
12/3/2012	2:09:14 PM	SiCl4 pre valve closed
12/3/2012	2:09:14 PM	SiCl4 post valve closed
12/3/2012	2:09:14 PM	Main Vac valve closed
12/3/2012	2:09:14 PM	Bypass valve closed
12/3/2012	2:09:14 PM	H2 valve opened
12/3/2012	2:09:14 PM	Bubbler valve opened
12/3/2012	2:09:14 PM	Helium MFC set to  0.000000
12/3/2012	2:09:14 PM	H2 MFC set to  500.000000
12/3/2012	2:09:14 PM	BCl3 MFC set to  0.000000
12/3/2012	2:09:14 PM	PH3 MFC set to  0.000000
12/3/2012	2:09:14 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:09:14 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:09:14 PM	Tube furnace set to 800
12/3/2012	2:12:14 PM	Helium valve closed
12/3/2012	2:12:14 PM	BCl3 valve closed
12/3/2012	2:12:14 PM	PH3 valve closed
12/3/2012	2:12:14 PM	SiCl4 pre valve closed
12/3/2012	2:12:14 PM	SiCl4 post valve closed
12/3/2012	2:12:14 PM	Main Vac valve closed
12/3/2012	2:12:14 PM	Bypass valve closed
12/3/2012	2:12:14 PM	H2 valve opened
12/3/2012	2:12:14 PM	Bubbler valve opened
12/3/2012	2:12:14 PM	Helium MFC set to  0.000000
12/3/2012	2:12:14 PM	H2 MFC set to  500.000000
12/3/2012	2:12:14 PM	BCl3 MFC set to  0.000000
12/3/2012	2:12:14 PM	PH3 MFC set to  0.000000
12/3/2012	2:12:14 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:12:14 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:12:14 PM	Tube furnace set to 750
12/3/2012	2:15:14 PM	H2 valve closed
12/3/2012	2:15:14 PM	BCl3 valve closed
12/3/2012	2:15:14 PM	PH3 valve closed
12/3/2012	2:15:14 PM	SiCl4 pre valve closed
12/3/2012	2:15:14 PM	SiCl4 post valve closed
12/3/2012	2:15:14 PM	Main Vac valve closed
12/3/2012	2:15:14 PM	Bypass valve closed
12/3/2012	2:15:14 PM	Helium valve opened
12/3/2012	2:15:14 PM	Bubbler valve opened
12/3/2012	2:15:14 PM	Helium MFC set to  500.000000
12/3/2012	2:15:14 PM	H2 MFC set to  0.000000
12/3/2012	2:15:14 PM	BCl3 MFC set to  0.000000
12/3/2012	2:15:14 PM	PH3 MFC set to  0.000000
12/3/2012	2:15:14 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:15:14 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:15:14 PM	Tube furnace set to 0
12/3/2012	2:35:14 PM	Helium valve closed
12/3/2012	2:35:14 PM	H2 valve closed
12/3/2012	2:35:14 PM	BCl3 valve closed
12/3/2012	2:35:14 PM	PH3 valve closed
12/3/2012	2:35:14 PM	SiCl4 pre valve closed
12/3/2012	2:35:14 PM	SiCl4 post valve closed
12/3/2012	2:35:14 PM	Main Vac valve closed
12/3/2012	2:35:14 PM	Bypass valve closed
12/3/2012	2:35:14 PM	Bubbler valve closed
12/3/2012	2:35:14 PM	Helium MFC set to  0.000000
12/3/2012	2:35:14 PM	H2 MFC set to  0.000000
12/3/2012	2:35:14 PM	BCl3 MFC set to  0.000000
12/3/2012	2:35:14 PM	PH3 MFC set to  0.000000
12/3/2012	2:35:14 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:35:14 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:35:14 PM	Tube furnace set to 0
12/3/2012	2:47:30 PM	Run aborted at 2:47 PM
12/3/2012	2:47:30 PM	Helium valve closed
12/3/2012	2:47:30 PM	H2 valve closed
12/3/2012	2:47:30 PM	BCl3 valve closed
12/3/2012	2:47:30 PM	PH3 valve closed
12/3/2012	2:47:30 PM	SiCl4 pre valve closed
12/3/2012	2:47:30 PM	SiCl4 post valve closed
12/3/2012	2:47:30 PM	Bypass valve closed
12/3/2012	2:47:30 PM	Main Vac valve closed
12/3/2012	2:47:30 PM	Bubbler valve closed
12/3/2012	2:47:30 PM	Helium MFC set to  0.000000
12/3/2012	2:47:30 PM	H2 MFC set to  0.000000
12/3/2012	2:47:30 PM	BCl3 MFC set to  0.000000
12/3/2012	2:47:30 PM	PH3 MFC set to  0.000000
12/3/2012	2:47:30 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:47:30 PM	Tube furnace set to 0
12/3/2012	2:51:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	2:51:34 PM	Recipe started at 2:51 PM
12/3/2012	2:51:34 PM	Helium valve closed
12/3/2012	2:51:34 PM	H2 valve closed
12/3/2012	2:51:34 PM	BCl3 valve closed
12/3/2012	2:51:34 PM	PH3 valve closed
12/3/2012	2:51:34 PM	SiCl4 pre valve closed
12/3/2012	2:51:34 PM	SiCl4 post valve closed
12/3/2012	2:51:34 PM	Main Vac valve closed
12/3/2012	2:51:34 PM	Bubbler valve closed
12/3/2012	2:51:34 PM	Bypass valve opened
12/3/2012	2:51:34 PM	Helium MFC set to  0.000000
12/3/2012	2:51:34 PM	H2 MFC set to  0.000000
12/3/2012	2:51:34 PM	BCl3 MFC set to  0.000000
12/3/2012	2:51:34 PM	PH3 MFC set to  0.000000
12/3/2012	2:51:34 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:51:34 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:51:34 PM	Tube furnace set to 0
12/3/2012	2:52:48 PM	Helium valve closed
12/3/2012	2:52:48 PM	H2 valve closed
12/3/2012	2:52:48 PM	BCl3 valve closed
12/3/2012	2:52:48 PM	PH3 valve closed
12/3/2012	2:52:48 PM	SiCl4 pre valve closed
12/3/2012	2:52:48 PM	SiCl4 post valve closed
12/3/2012	2:52:48 PM	Main Vac valve closed
12/3/2012	2:52:48 PM	Bubbler valve closed
12/3/2012	2:52:48 PM	Bypass valve opened
12/3/2012	2:52:48 PM	Helium MFC set to  0.000000
12/3/2012	2:52:48 PM	H2 MFC set to  0.000000
12/3/2012	2:52:48 PM	BCl3 MFC set to  0.000000
12/3/2012	2:52:48 PM	PH3 MFC set to  0.000000
12/3/2012	2:52:48 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:52:48 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:52:48 PM	Tube furnace set to 0
12/3/2012	2:53:49 PM	Helium valve closed
12/3/2012	2:53:49 PM	H2 valve closed
12/3/2012	2:53:49 PM	BCl3 valve closed
12/3/2012	2:53:49 PM	PH3 valve closed
12/3/2012	2:53:49 PM	SiCl4 pre valve closed
12/3/2012	2:53:49 PM	SiCl4 post valve closed
12/3/2012	2:53:49 PM	Bypass valve closed
12/3/2012	2:53:49 PM	Bubbler valve closed
12/3/2012	2:53:49 PM	Main Vac valve opened
12/3/2012	2:53:49 PM	Helium MFC set to  0.000000
12/3/2012	2:53:49 PM	H2 MFC set to  0.000000
12/3/2012	2:53:49 PM	BCl3 MFC set to  0.000000
12/3/2012	2:53:49 PM	PH3 MFC set to  0.000000
12/3/2012	2:53:49 PM	SiCl4 MFC set to  0.000000
12/3/2012	2:53:49 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	2:53:49 PM	Tube furnace set to 0
12/3/2012	2:53:50 PM	Run finished at 2:53 PM
12/3/2012	2:53:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	3:03:33 PM	Helium valve closed
12/3/2012	3:03:33 PM	H2 valve closed
12/3/2012	3:03:33 PM	BCl3 valve closed
12/3/2012	3:03:33 PM	PH3 valve closed
12/3/2012	3:03:33 PM	SiCl4 pre valve closed
12/3/2012	3:03:33 PM	SiCl4 post valve closed
12/3/2012	3:03:33 PM	Main Vac valve closed
12/3/2012	3:03:33 PM	Bypass valve closed
12/3/2012	3:03:33 PM	Bubbler valve closed
12/3/2012	3:03:34 PM	Helium MFC set to  0.000000
12/3/2012	3:03:34 PM	H2 MFC set to  0.000000
12/3/2012	3:03:34 PM	BCl3 MFC set to  0.000000
12/3/2012	3:03:34 PM	PH3 MFC set to  0.000000
12/3/2012	3:03:34 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:03:34 PM	Bypass solenoid MFC set to  760.000000
12/3/2012	3:03:34 PM	Tube furnace set to 0
12/3/2012	3:03:35 PM	Main Vac valve opened
12/3/2012	3:04:24 PM	Recipe started at 3:04 PM
12/3/2012	3:04:24 PM	Helium valve closed
12/3/2012	3:04:24 PM	H2 valve closed
12/3/2012	3:04:24 PM	BCl3 valve closed
12/3/2012	3:04:24 PM	PH3 valve closed
12/3/2012	3:04:24 PM	SiCl4 pre valve closed
12/3/2012	3:04:24 PM	SiCl4 post valve closed
12/3/2012	3:04:24 PM	Bypass valve closed
12/3/2012	3:04:24 PM	Bubbler valve closed
12/3/2012	3:04:24 PM	Main Vac valve opened
12/3/2012	3:04:24 PM	Helium MFC set to  0.000000
12/3/2012	3:04:24 PM	H2 MFC set to  0.000000
12/3/2012	3:04:24 PM	BCl3 MFC set to  0.000000
12/3/2012	3:04:24 PM	PH3 MFC set to  0.000000
12/3/2012	3:04:24 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:04:24 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:04:25 PM	Tube furnace set to 150
12/3/2012	3:04:35 PM	Run aborted at 3:04 PM
12/3/2012	3:04:35 PM	Helium valve closed
12/3/2012	3:04:35 PM	H2 valve closed
12/3/2012	3:04:35 PM	BCl3 valve closed
12/3/2012	3:04:35 PM	PH3 valve closed
12/3/2012	3:04:35 PM	SiCl4 pre valve closed
12/3/2012	3:04:35 PM	SiCl4 post valve closed
12/3/2012	3:04:35 PM	Bypass valve closed
12/3/2012	3:04:35 PM	Main Vac valve closed
12/3/2012	3:04:35 PM	Bubbler valve closed
12/3/2012	3:04:35 PM	Helium MFC set to  0.000000
12/3/2012	3:04:35 PM	H2 MFC set to  0.000000
12/3/2012	3:04:35 PM	BCl3 MFC set to  0.000000
12/3/2012	3:04:35 PM	PH3 MFC set to  0.000000
12/3/2012	3:04:35 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:04:35 PM	Tube furnace set to 0
12/3/2012	3:05:01 PM	Recipe started at 3:04 PM
12/3/2012	3:05:01 PM	Helium valve closed
12/3/2012	3:05:01 PM	H2 valve closed
12/3/2012	3:05:01 PM	BCl3 valve closed
12/3/2012	3:05:01 PM	PH3 valve closed
12/3/2012	3:05:01 PM	SiCl4 pre valve closed
12/3/2012	3:05:01 PM	SiCl4 post valve closed
12/3/2012	3:05:01 PM	Bypass valve closed
12/3/2012	3:05:01 PM	Bubbler valve closed
12/3/2012	3:05:01 PM	Main Vac valve opened
12/3/2012	3:05:01 PM	Helium MFC set to  0.000000
12/3/2012	3:05:01 PM	H2 MFC set to  0.000000
12/3/2012	3:05:01 PM	BCl3 MFC set to  0.000000
12/3/2012	3:05:01 PM	PH3 MFC set to  0.000000
12/3/2012	3:05:01 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:05:01 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:05:01 PM	Tube furnace set to 150
12/3/2012	3:05:15 PM	H2 valve closed
12/3/2012	3:05:15 PM	BCl3 valve closed
12/3/2012	3:05:15 PM	PH3 valve closed
12/3/2012	3:05:15 PM	SiCl4 pre valve closed
12/3/2012	3:05:15 PM	SiCl4 post valve closed
12/3/2012	3:05:15 PM	Bypass valve closed
12/3/2012	3:05:15 PM	Bubbler valve closed
12/3/2012	3:05:15 PM	Helium valve opened
12/3/2012	3:05:15 PM	Main Vac valve opened
12/3/2012	3:05:15 PM	Helium MFC set to  20.000000
12/3/2012	3:05:15 PM	H2 MFC set to  0.000000
12/3/2012	3:05:15 PM	BCl3 MFC set to  0.000000
12/3/2012	3:05:15 PM	PH3 MFC set to  0.000000
12/3/2012	3:05:15 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:05:15 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:05:16 PM	Tube furnace set to 150
12/3/2012	3:05:38 PM	Helium valve closed
12/3/2012	3:05:38 PM	H2 valve closed
12/3/2012	3:05:38 PM	BCl3 valve closed
12/3/2012	3:05:38 PM	PH3 valve closed
12/3/2012	3:05:38 PM	SiCl4 pre valve closed
12/3/2012	3:05:38 PM	SiCl4 post valve closed
12/3/2012	3:05:38 PM	Bypass valve closed
12/3/2012	3:05:38 PM	Bubbler valve closed
12/3/2012	3:05:38 PM	Main Vac valve opened
12/3/2012	3:05:38 PM	Helium MFC set to  0.000000
12/3/2012	3:05:38 PM	H2 MFC set to  0.000000
12/3/2012	3:05:38 PM	BCl3 MFC set to  0.000000
12/3/2012	3:05:38 PM	PH3 MFC set to  0.000000
12/3/2012	3:05:38 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:05:38 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:05:38 PM	Tube furnace set to 150
12/3/2012	3:05:56 PM	Run aborted at 3:05 PM
12/3/2012	3:05:56 PM	Helium valve closed
12/3/2012	3:05:56 PM	H2 valve closed
12/3/2012	3:05:56 PM	BCl3 valve closed
12/3/2012	3:05:56 PM	PH3 valve closed
12/3/2012	3:05:56 PM	SiCl4 pre valve closed
12/3/2012	3:05:56 PM	SiCl4 post valve closed
12/3/2012	3:05:56 PM	Bypass valve closed
12/3/2012	3:05:56 PM	Main Vac valve closed
12/3/2012	3:05:56 PM	Bubbler valve closed
12/3/2012	3:05:56 PM	Helium MFC set to  0.000000
12/3/2012	3:05:56 PM	H2 MFC set to  0.000000
12/3/2012	3:05:56 PM	BCl3 MFC set to  0.000000
12/3/2012	3:05:56 PM	PH3 MFC set to  0.000000
12/3/2012	3:05:56 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:05:56 PM	Tube furnace set to 0
12/3/2012	3:05:58 PM	Main Vac valve opened
12/3/2012	3:06:08 PM	Program exited cleanly
12/3/2012	3:10:57 PM	Helium valve closed
12/3/2012	3:10:57 PM	H2 valve closed
12/3/2012	3:10:57 PM	BCl3 valve closed
12/3/2012	3:10:57 PM	PH3 valve closed
12/3/2012	3:10:57 PM	SiCl4 pre valve closed
12/3/2012	3:10:57 PM	SiCl4 post valve closed
12/3/2012	3:10:57 PM	Main Vac valve closed
12/3/2012	3:10:57 PM	Bypass valve closed
12/3/2012	3:10:57 PM	Bubbler valve closed
12/3/2012	3:10:57 PM	Helium MFC set to  0.000000
12/3/2012	3:10:57 PM	H2 MFC set to  0.000000
12/3/2012	3:10:57 PM	BCl3 MFC set to  0.000000
12/3/2012	3:10:57 PM	PH3 MFC set to  0.000000
12/3/2012	3:10:57 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:10:57 PM	Bypass solenoid MFC set to  760.000000
12/3/2012	3:10:57 PM	Tube furnace set to 0
12/3/2012	3:10:59 PM	Main Vac valve opened
12/3/2012	3:11:20 PM	Program exited cleanly
12/3/2012	3:20:15 PM	Helium valve closed
12/3/2012	3:20:15 PM	H2 valve closed
12/3/2012	3:20:15 PM	BCl3 valve closed
12/3/2012	3:20:15 PM	PH3 valve closed
12/3/2012	3:20:15 PM	SiCl4 pre valve closed
12/3/2012	3:20:15 PM	SiCl4 post valve closed
12/3/2012	3:20:15 PM	Main Vac valve closed
12/3/2012	3:20:15 PM	Bypass valve closed
12/3/2012	3:20:15 PM	Bubbler valve closed
12/3/2012	3:20:15 PM	Helium MFC set to  0.000000
12/3/2012	3:20:15 PM	H2 MFC set to  0.000000
12/3/2012	3:20:15 PM	BCl3 MFC set to  0.000000
12/3/2012	3:20:15 PM	PH3 MFC set to  0.000000
12/3/2012	3:20:15 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:20:15 PM	Bypass solenoid MFC set to  760.000000
12/3/2012	3:20:15 PM	Tube furnace set to 0
12/3/2012	3:20:16 PM	Main Vac valve opened
12/3/2012	3:20:52 PM	Recipe started at 3:20 PM
12/3/2012	3:20:52 PM	Helium valve closed
12/3/2012	3:20:52 PM	H2 valve closed
12/3/2012	3:20:52 PM	BCl3 valve closed
12/3/2012	3:20:52 PM	PH3 valve closed
12/3/2012	3:20:52 PM	SiCl4 pre valve closed
12/3/2012	3:20:52 PM	SiCl4 post valve closed
12/3/2012	3:20:52 PM	Bypass valve closed
12/3/2012	3:20:52 PM	Bubbler valve closed
12/3/2012	3:20:52 PM	Main Vac valve opened
12/3/2012	3:20:52 PM	Helium MFC set to  0.000000
12/3/2012	3:20:52 PM	H2 MFC set to  0.000000
12/3/2012	3:20:52 PM	BCl3 MFC set to  0.000000
12/3/2012	3:20:52 PM	PH3 MFC set to  0.000000
12/3/2012	3:20:52 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:20:52 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:20:53 PM	Tube furnace set to 150
12/3/2012	3:21:23 PM	H2 valve closed
12/3/2012	3:21:23 PM	BCl3 valve closed
12/3/2012	3:21:23 PM	PH3 valve closed
12/3/2012	3:21:23 PM	SiCl4 pre valve closed
12/3/2012	3:21:23 PM	SiCl4 post valve closed
12/3/2012	3:21:23 PM	Bypass valve closed
12/3/2012	3:21:23 PM	Bubbler valve closed
12/3/2012	3:21:23 PM	Helium valve opened
12/3/2012	3:21:23 PM	Main Vac valve opened
12/3/2012	3:21:23 PM	Helium MFC set to  20.000000
12/3/2012	3:21:23 PM	H2 MFC set to  0.000000
12/3/2012	3:21:23 PM	BCl3 MFC set to  0.000000
12/3/2012	3:21:23 PM	PH3 MFC set to  0.000000
12/3/2012	3:21:23 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:21:23 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:21:23 PM	Tube furnace set to 150
12/3/2012	3:21:53 PM	Helium valve closed
12/3/2012	3:21:53 PM	H2 valve closed
12/3/2012	3:21:53 PM	BCl3 valve closed
12/3/2012	3:21:53 PM	PH3 valve closed
12/3/2012	3:21:53 PM	SiCl4 pre valve closed
12/3/2012	3:21:53 PM	SiCl4 post valve closed
12/3/2012	3:21:53 PM	Bypass valve closed
12/3/2012	3:21:53 PM	Bubbler valve closed
12/3/2012	3:21:53 PM	Main Vac valve opened
12/3/2012	3:21:53 PM	Helium MFC set to  0.000000
12/3/2012	3:21:53 PM	H2 MFC set to  0.000000
12/3/2012	3:21:53 PM	BCl3 MFC set to  0.000000
12/3/2012	3:21:53 PM	PH3 MFC set to  0.000000
12/3/2012	3:21:53 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:21:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:21:53 PM	Tube furnace set to 150
12/3/2012	3:22:23 PM	H2 valve closed
12/3/2012	3:22:23 PM	BCl3 valve closed
12/3/2012	3:22:23 PM	PH3 valve closed
12/3/2012	3:22:23 PM	SiCl4 pre valve closed
12/3/2012	3:22:23 PM	SiCl4 post valve closed
12/3/2012	3:22:23 PM	Bypass valve closed
12/3/2012	3:22:23 PM	Bubbler valve closed
12/3/2012	3:22:23 PM	Helium valve opened
12/3/2012	3:22:23 PM	Main Vac valve opened
12/3/2012	3:22:23 PM	Helium MFC set to  20.000000
12/3/2012	3:22:23 PM	H2 MFC set to  0.000000
12/3/2012	3:22:23 PM	BCl3 MFC set to  0.000000
12/3/2012	3:22:23 PM	PH3 MFC set to  0.000000
12/3/2012	3:22:23 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:22:23 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:22:23 PM	Tube furnace set to 150
12/3/2012	3:22:53 PM	Helium valve closed
12/3/2012	3:22:53 PM	H2 valve closed
12/3/2012	3:22:53 PM	BCl3 valve closed
12/3/2012	3:22:53 PM	PH3 valve closed
12/3/2012	3:22:53 PM	SiCl4 pre valve closed
12/3/2012	3:22:53 PM	SiCl4 post valve closed
12/3/2012	3:22:53 PM	Bypass valve closed
12/3/2012	3:22:53 PM	Bubbler valve closed
12/3/2012	3:22:53 PM	Main Vac valve opened
12/3/2012	3:22:53 PM	Helium MFC set to  0.000000
12/3/2012	3:22:53 PM	H2 MFC set to  0.000000
12/3/2012	3:22:53 PM	BCl3 MFC set to  0.000000
12/3/2012	3:22:53 PM	PH3 MFC set to  0.000000
12/3/2012	3:22:53 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:22:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:22:54 PM	Tube furnace set to 150
12/3/2012	3:23:24 PM	H2 valve closed
12/3/2012	3:23:24 PM	BCl3 valve closed
12/3/2012	3:23:24 PM	PH3 valve closed
12/3/2012	3:23:24 PM	SiCl4 pre valve closed
12/3/2012	3:23:24 PM	SiCl4 post valve closed
12/3/2012	3:23:24 PM	Bypass valve closed
12/3/2012	3:23:24 PM	Bubbler valve closed
12/3/2012	3:23:24 PM	Helium valve opened
12/3/2012	3:23:24 PM	Main Vac valve opened
12/3/2012	3:23:24 PM	Helium MFC set to  20.000000
12/3/2012	3:23:24 PM	H2 MFC set to  0.000000
12/3/2012	3:23:24 PM	BCl3 MFC set to  0.000000
12/3/2012	3:23:24 PM	PH3 MFC set to  0.000000
12/3/2012	3:23:24 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:23:24 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:23:24 PM	Tube furnace set to 150
12/3/2012	3:23:54 PM	Helium valve closed
12/3/2012	3:23:54 PM	H2 valve closed
12/3/2012	3:23:54 PM	BCl3 valve closed
12/3/2012	3:23:54 PM	PH3 valve closed
12/3/2012	3:23:54 PM	SiCl4 pre valve closed
12/3/2012	3:23:54 PM	SiCl4 post valve closed
12/3/2012	3:23:54 PM	Bypass valve closed
12/3/2012	3:23:54 PM	Bubbler valve closed
12/3/2012	3:23:54 PM	Main Vac valve opened
12/3/2012	3:23:54 PM	Helium MFC set to  0.000000
12/3/2012	3:23:54 PM	H2 MFC set to  0.000000
12/3/2012	3:23:54 PM	BCl3 MFC set to  0.000000
12/3/2012	3:23:54 PM	PH3 MFC set to  0.000000
12/3/2012	3:23:54 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:23:54 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:23:54 PM	Tube furnace set to 150
12/3/2012	3:24:24 PM	H2 valve closed
12/3/2012	3:24:24 PM	BCl3 valve closed
12/3/2012	3:24:24 PM	PH3 valve closed
12/3/2012	3:24:24 PM	SiCl4 pre valve closed
12/3/2012	3:24:24 PM	SiCl4 post valve closed
12/3/2012	3:24:24 PM	Bypass valve closed
12/3/2012	3:24:24 PM	Bubbler valve closed
12/3/2012	3:24:24 PM	Helium valve opened
12/3/2012	3:24:24 PM	Main Vac valve opened
12/3/2012	3:24:24 PM	Helium MFC set to  20.000000
12/3/2012	3:24:24 PM	H2 MFC set to  0.000000
12/3/2012	3:24:24 PM	BCl3 MFC set to  0.000000
12/3/2012	3:24:24 PM	PH3 MFC set to  0.000000
12/3/2012	3:24:24 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:24:24 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:24:24 PM	Tube furnace set to 150
12/3/2012	3:24:54 PM	Helium valve closed
12/3/2012	3:24:54 PM	H2 valve closed
12/3/2012	3:24:54 PM	BCl3 valve closed
12/3/2012	3:24:54 PM	PH3 valve closed
12/3/2012	3:24:54 PM	SiCl4 pre valve closed
12/3/2012	3:24:54 PM	SiCl4 post valve closed
12/3/2012	3:24:54 PM	Bypass valve closed
12/3/2012	3:24:54 PM	Bubbler valve closed
12/3/2012	3:24:54 PM	Main Vac valve opened
12/3/2012	3:24:54 PM	Helium MFC set to  0.000000
12/3/2012	3:24:54 PM	H2 MFC set to  0.000000
12/3/2012	3:24:54 PM	BCl3 MFC set to  0.000000
12/3/2012	3:24:54 PM	PH3 MFC set to  0.000000
12/3/2012	3:24:54 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:24:54 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:24:55 PM	Tube furnace set to 150
12/3/2012	3:25:25 PM	H2 valve closed
12/3/2012	3:25:25 PM	BCl3 valve closed
12/3/2012	3:25:25 PM	PH3 valve closed
12/3/2012	3:25:25 PM	SiCl4 pre valve closed
12/3/2012	3:25:25 PM	SiCl4 post valve closed
12/3/2012	3:25:25 PM	Bypass valve closed
12/3/2012	3:25:25 PM	Bubbler valve closed
12/3/2012	3:25:25 PM	Helium valve opened
12/3/2012	3:25:25 PM	Main Vac valve opened
12/3/2012	3:25:25 PM	Helium MFC set to  20.000000
12/3/2012	3:25:25 PM	H2 MFC set to  0.000000
12/3/2012	3:25:25 PM	BCl3 MFC set to  0.000000
12/3/2012	3:25:25 PM	PH3 MFC set to  0.000000
12/3/2012	3:25:25 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:25:25 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:25:25 PM	Tube furnace set to 150
12/3/2012	3:25:55 PM	Helium valve closed
12/3/2012	3:25:55 PM	H2 valve closed
12/3/2012	3:25:55 PM	BCl3 valve closed
12/3/2012	3:25:55 PM	PH3 valve closed
12/3/2012	3:25:55 PM	SiCl4 pre valve closed
12/3/2012	3:25:55 PM	SiCl4 post valve closed
12/3/2012	3:25:55 PM	Bypass valve closed
12/3/2012	3:25:55 PM	Bubbler valve closed
12/3/2012	3:25:55 PM	Main Vac valve opened
12/3/2012	3:25:55 PM	Helium MFC set to  0.000000
12/3/2012	3:25:55 PM	H2 MFC set to  0.000000
12/3/2012	3:25:55 PM	BCl3 MFC set to  0.000000
12/3/2012	3:25:55 PM	PH3 MFC set to  0.000000
12/3/2012	3:25:55 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:25:55 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:25:55 PM	Tube furnace set to 150
12/3/2012	3:26:25 PM	H2 valve closed
12/3/2012	3:26:25 PM	BCl3 valve closed
12/3/2012	3:26:25 PM	PH3 valve closed
12/3/2012	3:26:25 PM	SiCl4 pre valve closed
12/3/2012	3:26:25 PM	SiCl4 post valve closed
12/3/2012	3:26:25 PM	Bypass valve closed
12/3/2012	3:26:25 PM	Bubbler valve closed
12/3/2012	3:26:25 PM	Helium valve opened
12/3/2012	3:26:25 PM	Main Vac valve opened
12/3/2012	3:26:25 PM	Helium MFC set to  20.000000
12/3/2012	3:26:25 PM	H2 MFC set to  0.000000
12/3/2012	3:26:25 PM	BCl3 MFC set to  0.000000
12/3/2012	3:26:25 PM	PH3 MFC set to  0.000000
12/3/2012	3:26:25 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:26:25 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:26:25 PM	Tube furnace set to 150
12/3/2012	3:26:55 PM	Helium valve closed
12/3/2012	3:26:55 PM	H2 valve closed
12/3/2012	3:26:55 PM	BCl3 valve closed
12/3/2012	3:26:55 PM	PH3 valve closed
12/3/2012	3:26:55 PM	SiCl4 pre valve closed
12/3/2012	3:26:55 PM	SiCl4 post valve closed
12/3/2012	3:26:55 PM	Bypass valve closed
12/3/2012	3:26:55 PM	Bubbler valve closed
12/3/2012	3:26:55 PM	Main Vac valve opened
12/3/2012	3:26:55 PM	Helium MFC set to  0.000000
12/3/2012	3:26:55 PM	H2 MFC set to  0.000000
12/3/2012	3:26:55 PM	BCl3 MFC set to  0.000000
12/3/2012	3:26:55 PM	PH3 MFC set to  0.000000
12/3/2012	3:26:55 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:26:55 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:26:56 PM	Tube furnace set to 150
12/3/2012	3:27:26 PM	H2 valve closed
12/3/2012	3:27:26 PM	BCl3 valve closed
12/3/2012	3:27:26 PM	PH3 valve closed
12/3/2012	3:27:26 PM	SiCl4 pre valve closed
12/3/2012	3:27:26 PM	SiCl4 post valve closed
12/3/2012	3:27:26 PM	Bypass valve closed
12/3/2012	3:27:26 PM	Bubbler valve closed
12/3/2012	3:27:26 PM	Helium valve opened
12/3/2012	3:27:26 PM	Main Vac valve opened
12/3/2012	3:27:26 PM	Helium MFC set to  20.000000
12/3/2012	3:27:26 PM	H2 MFC set to  0.000000
12/3/2012	3:27:26 PM	BCl3 MFC set to  0.000000
12/3/2012	3:27:26 PM	PH3 MFC set to  0.000000
12/3/2012	3:27:26 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:27:26 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:27:26 PM	Tube furnace set to 150
12/3/2012	3:27:56 PM	Helium valve closed
12/3/2012	3:27:56 PM	H2 valve closed
12/3/2012	3:27:56 PM	BCl3 valve closed
12/3/2012	3:27:56 PM	PH3 valve closed
12/3/2012	3:27:56 PM	SiCl4 pre valve closed
12/3/2012	3:27:56 PM	SiCl4 post valve closed
12/3/2012	3:27:56 PM	Bypass valve closed
12/3/2012	3:27:56 PM	Bubbler valve closed
12/3/2012	3:27:56 PM	Main Vac valve opened
12/3/2012	3:27:56 PM	Helium MFC set to  0.000000
12/3/2012	3:27:56 PM	H2 MFC set to  0.000000
12/3/2012	3:27:56 PM	BCl3 MFC set to  0.000000
12/3/2012	3:27:56 PM	PH3 MFC set to  0.000000
12/3/2012	3:27:56 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:27:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:27:56 PM	Tube furnace set to 150
12/3/2012	3:28:26 PM	H2 valve closed
12/3/2012	3:28:26 PM	BCl3 valve closed
12/3/2012	3:28:26 PM	PH3 valve closed
12/3/2012	3:28:26 PM	SiCl4 pre valve closed
12/3/2012	3:28:26 PM	SiCl4 post valve closed
12/3/2012	3:28:26 PM	Bypass valve closed
12/3/2012	3:28:26 PM	Bubbler valve closed
12/3/2012	3:28:26 PM	Helium valve opened
12/3/2012	3:28:26 PM	Main Vac valve opened
12/3/2012	3:28:26 PM	Helium MFC set to  20.000000
12/3/2012	3:28:26 PM	H2 MFC set to  0.000000
12/3/2012	3:28:26 PM	BCl3 MFC set to  0.000000
12/3/2012	3:28:26 PM	PH3 MFC set to  0.000000
12/3/2012	3:28:26 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:28:26 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:28:26 PM	Tube furnace set to 150
12/3/2012	3:28:56 PM	Helium valve closed
12/3/2012	3:28:56 PM	H2 valve closed
12/3/2012	3:28:56 PM	BCl3 valve closed
12/3/2012	3:28:56 PM	PH3 valve closed
12/3/2012	3:28:56 PM	SiCl4 pre valve closed
12/3/2012	3:28:56 PM	SiCl4 post valve closed
12/3/2012	3:28:56 PM	Bypass valve closed
12/3/2012	3:28:56 PM	Bubbler valve closed
12/3/2012	3:28:56 PM	Main Vac valve opened
12/3/2012	3:28:56 PM	Helium MFC set to  0.000000
12/3/2012	3:28:56 PM	H2 MFC set to  0.000000
12/3/2012	3:28:56 PM	BCl3 MFC set to  0.000000
12/3/2012	3:28:56 PM	PH3 MFC set to  0.000000
12/3/2012	3:28:56 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:28:56 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:28:57 PM	Tube furnace set to 150
12/3/2012	3:29:27 PM	H2 valve closed
12/3/2012	3:29:27 PM	BCl3 valve closed
12/3/2012	3:29:27 PM	PH3 valve closed
12/3/2012	3:29:27 PM	SiCl4 pre valve closed
12/3/2012	3:29:27 PM	SiCl4 post valve closed
12/3/2012	3:29:27 PM	Bypass valve closed
12/3/2012	3:29:27 PM	Bubbler valve closed
12/3/2012	3:29:27 PM	Helium valve opened
12/3/2012	3:29:27 PM	Main Vac valve opened
12/3/2012	3:29:27 PM	Helium MFC set to  20.000000
12/3/2012	3:29:27 PM	H2 MFC set to  0.000000
12/3/2012	3:29:27 PM	BCl3 MFC set to  0.000000
12/3/2012	3:29:27 PM	PH3 MFC set to  0.000000
12/3/2012	3:29:27 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:29:27 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:29:27 PM	Tube furnace set to 150
12/3/2012	3:29:57 PM	Helium valve closed
12/3/2012	3:29:57 PM	H2 valve closed
12/3/2012	3:29:57 PM	BCl3 valve closed
12/3/2012	3:29:57 PM	PH3 valve closed
12/3/2012	3:29:57 PM	SiCl4 pre valve closed
12/3/2012	3:29:57 PM	SiCl4 post valve closed
12/3/2012	3:29:57 PM	Bypass valve closed
12/3/2012	3:29:57 PM	Bubbler valve closed
12/3/2012	3:29:57 PM	Main Vac valve opened
12/3/2012	3:29:57 PM	Helium MFC set to  0.000000
12/3/2012	3:29:57 PM	H2 MFC set to  0.000000
12/3/2012	3:29:57 PM	BCl3 MFC set to  0.000000
12/3/2012	3:29:57 PM	PH3 MFC set to  0.000000
12/3/2012	3:29:57 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:29:57 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:29:57 PM	Tube furnace set to 150
12/3/2012	3:30:27 PM	H2 valve closed
12/3/2012	3:30:27 PM	BCl3 valve closed
12/3/2012	3:30:27 PM	PH3 valve closed
12/3/2012	3:30:27 PM	SiCl4 pre valve closed
12/3/2012	3:30:27 PM	SiCl4 post valve closed
12/3/2012	3:30:27 PM	Bypass valve closed
12/3/2012	3:30:27 PM	Bubbler valve closed
12/3/2012	3:30:27 PM	Helium valve opened
12/3/2012	3:30:27 PM	Main Vac valve opened
12/3/2012	3:30:27 PM	Helium MFC set to  20.000000
12/3/2012	3:30:27 PM	H2 MFC set to  0.000000
12/3/2012	3:30:27 PM	BCl3 MFC set to  0.000000
12/3/2012	3:30:27 PM	PH3 MFC set to  0.000000
12/3/2012	3:30:27 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:30:27 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:30:27 PM	Tube furnace set to 150
12/3/2012	3:30:57 PM	Helium valve closed
12/3/2012	3:30:57 PM	H2 valve closed
12/3/2012	3:30:57 PM	BCl3 valve closed
12/3/2012	3:30:57 PM	PH3 valve closed
12/3/2012	3:30:57 PM	SiCl4 pre valve closed
12/3/2012	3:30:57 PM	SiCl4 post valve closed
12/3/2012	3:30:57 PM	Bypass valve closed
12/3/2012	3:30:57 PM	Bubbler valve closed
12/3/2012	3:30:57 PM	Main Vac valve opened
12/3/2012	3:30:57 PM	Helium MFC set to  0.000000
12/3/2012	3:30:57 PM	H2 MFC set to  0.000000
12/3/2012	3:30:57 PM	BCl3 MFC set to  0.000000
12/3/2012	3:30:57 PM	PH3 MFC set to  0.000000
12/3/2012	3:30:57 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:30:57 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:30:58 PM	Tube furnace set to 150
12/3/2012	3:30:59 PM	Run finished at 3:30 PM
12/3/2012	3:34:25 PM	Main Vac valve closed
12/3/2012	3:34:41 PM	Main Vac valve opened
12/3/2012	3:34:48 PM	Recipe started at 3:34 PM
12/3/2012	3:34:48 PM	Helium valve closed
12/3/2012	3:34:48 PM	H2 valve closed
12/3/2012	3:34:48 PM	BCl3 valve closed
12/3/2012	3:34:48 PM	PH3 valve closed
12/3/2012	3:34:48 PM	SiCl4 pre valve closed
12/3/2012	3:34:48 PM	SiCl4 post valve closed
12/3/2012	3:34:48 PM	Bypass valve closed
12/3/2012	3:34:48 PM	Bubbler valve closed
12/3/2012	3:34:48 PM	Main Vac valve opened
12/3/2012	3:34:48 PM	Helium MFC set to  0.000000
12/3/2012	3:34:48 PM	H2 MFC set to  0.000000
12/3/2012	3:34:48 PM	BCl3 MFC set to  0.000000
12/3/2012	3:34:48 PM	PH3 MFC set to  0.000000
12/3/2012	3:34:48 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:34:48 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:34:48 PM	Tube furnace set to 150
12/3/2012	3:35:18 PM	H2 valve closed
12/3/2012	3:35:18 PM	BCl3 valve closed
12/3/2012	3:35:18 PM	PH3 valve closed
12/3/2012	3:35:18 PM	SiCl4 pre valve closed
12/3/2012	3:35:18 PM	SiCl4 post valve closed
12/3/2012	3:35:18 PM	Bypass valve closed
12/3/2012	3:35:18 PM	Bubbler valve closed
12/3/2012	3:35:18 PM	Helium valve opened
12/3/2012	3:35:18 PM	Main Vac valve opened
12/3/2012	3:35:18 PM	Helium MFC set to  20.000000
12/3/2012	3:35:18 PM	H2 MFC set to  0.000000
12/3/2012	3:35:18 PM	BCl3 MFC set to  0.000000
12/3/2012	3:35:18 PM	PH3 MFC set to  0.000000
12/3/2012	3:35:18 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:35:18 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:35:19 PM	Tube furnace set to 150
12/3/2012	3:35:49 PM	Helium valve closed
12/3/2012	3:35:49 PM	H2 valve closed
12/3/2012	3:35:49 PM	BCl3 valve closed
12/3/2012	3:35:49 PM	PH3 valve closed
12/3/2012	3:35:49 PM	SiCl4 pre valve closed
12/3/2012	3:35:49 PM	SiCl4 post valve closed
12/3/2012	3:35:49 PM	Bypass valve closed
12/3/2012	3:35:49 PM	Bubbler valve closed
12/3/2012	3:35:49 PM	Main Vac valve opened
12/3/2012	3:35:49 PM	Helium MFC set to  0.000000
12/3/2012	3:35:49 PM	H2 MFC set to  0.000000
12/3/2012	3:35:49 PM	BCl3 MFC set to  0.000000
12/3/2012	3:35:49 PM	PH3 MFC set to  0.000000
12/3/2012	3:35:49 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:35:49 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:35:49 PM	Tube furnace set to 150
12/3/2012	3:36:19 PM	H2 valve closed
12/3/2012	3:36:19 PM	BCl3 valve closed
12/3/2012	3:36:19 PM	PH3 valve closed
12/3/2012	3:36:19 PM	SiCl4 pre valve closed
12/3/2012	3:36:19 PM	SiCl4 post valve closed
12/3/2012	3:36:19 PM	Bypass valve closed
12/3/2012	3:36:19 PM	Bubbler valve closed
12/3/2012	3:36:19 PM	Helium valve opened
12/3/2012	3:36:19 PM	Main Vac valve opened
12/3/2012	3:36:19 PM	Helium MFC set to  20.000000
12/3/2012	3:36:19 PM	H2 MFC set to  0.000000
12/3/2012	3:36:19 PM	BCl3 MFC set to  0.000000
12/3/2012	3:36:19 PM	PH3 MFC set to  0.000000
12/3/2012	3:36:19 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:36:19 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:36:19 PM	Tube furnace set to 150
12/3/2012	3:36:49 PM	Helium valve closed
12/3/2012	3:36:49 PM	H2 valve closed
12/3/2012	3:36:49 PM	BCl3 valve closed
12/3/2012	3:36:49 PM	PH3 valve closed
12/3/2012	3:36:49 PM	SiCl4 pre valve closed
12/3/2012	3:36:49 PM	SiCl4 post valve closed
12/3/2012	3:36:49 PM	Bypass valve closed
12/3/2012	3:36:49 PM	Bubbler valve closed
12/3/2012	3:36:49 PM	Main Vac valve opened
12/3/2012	3:36:49 PM	Helium MFC set to  0.000000
12/3/2012	3:36:49 PM	H2 MFC set to  0.000000
12/3/2012	3:36:49 PM	BCl3 MFC set to  0.000000
12/3/2012	3:36:49 PM	PH3 MFC set to  0.000000
12/3/2012	3:36:49 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:36:49 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:36:49 PM	Tube furnace set to 150
12/3/2012	3:37:19 PM	H2 valve closed
12/3/2012	3:37:19 PM	BCl3 valve closed
12/3/2012	3:37:19 PM	PH3 valve closed
12/3/2012	3:37:19 PM	SiCl4 pre valve closed
12/3/2012	3:37:19 PM	SiCl4 post valve closed
12/3/2012	3:37:19 PM	Bypass valve closed
12/3/2012	3:37:19 PM	Bubbler valve closed
12/3/2012	3:37:19 PM	Helium valve opened
12/3/2012	3:37:19 PM	Main Vac valve opened
12/3/2012	3:37:19 PM	Helium MFC set to  20.000000
12/3/2012	3:37:19 PM	H2 MFC set to  0.000000
12/3/2012	3:37:19 PM	BCl3 MFC set to  0.000000
12/3/2012	3:37:19 PM	PH3 MFC set to  0.000000
12/3/2012	3:37:19 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:37:19 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:37:20 PM	Tube furnace set to 150
12/3/2012	3:37:50 PM	Helium valve closed
12/3/2012	3:37:50 PM	H2 valve closed
12/3/2012	3:37:50 PM	BCl3 valve closed
12/3/2012	3:37:50 PM	PH3 valve closed
12/3/2012	3:37:50 PM	SiCl4 pre valve closed
12/3/2012	3:37:50 PM	SiCl4 post valve closed
12/3/2012	3:37:50 PM	Bypass valve closed
12/3/2012	3:37:50 PM	Bubbler valve closed
12/3/2012	3:37:50 PM	Main Vac valve opened
12/3/2012	3:37:50 PM	Helium MFC set to  0.000000
12/3/2012	3:37:50 PM	H2 MFC set to  0.000000
12/3/2012	3:37:50 PM	BCl3 MFC set to  0.000000
12/3/2012	3:37:50 PM	PH3 MFC set to  0.000000
12/3/2012	3:37:50 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:37:50 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:37:50 PM	Tube furnace set to 150
12/3/2012	3:38:20 PM	H2 valve closed
12/3/2012	3:38:20 PM	BCl3 valve closed
12/3/2012	3:38:20 PM	PH3 valve closed
12/3/2012	3:38:20 PM	SiCl4 pre valve closed
12/3/2012	3:38:20 PM	SiCl4 post valve closed
12/3/2012	3:38:20 PM	Bypass valve closed
12/3/2012	3:38:20 PM	Bubbler valve closed
12/3/2012	3:38:20 PM	Helium valve opened
12/3/2012	3:38:20 PM	Main Vac valve opened
12/3/2012	3:38:20 PM	Helium MFC set to  20.000000
12/3/2012	3:38:20 PM	H2 MFC set to  0.000000
12/3/2012	3:38:20 PM	BCl3 MFC set to  0.000000
12/3/2012	3:38:20 PM	PH3 MFC set to  0.000000
12/3/2012	3:38:20 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:38:20 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:38:20 PM	Tube furnace set to 150
12/3/2012	3:38:50 PM	Helium valve closed
12/3/2012	3:38:50 PM	H2 valve closed
12/3/2012	3:38:50 PM	BCl3 valve closed
12/3/2012	3:38:50 PM	PH3 valve closed
12/3/2012	3:38:50 PM	SiCl4 pre valve closed
12/3/2012	3:38:50 PM	SiCl4 post valve closed
12/3/2012	3:38:50 PM	Bypass valve closed
12/3/2012	3:38:50 PM	Bubbler valve closed
12/3/2012	3:38:50 PM	Main Vac valve opened
12/3/2012	3:38:50 PM	Helium MFC set to  0.000000
12/3/2012	3:38:50 PM	H2 MFC set to  0.000000
12/3/2012	3:38:50 PM	BCl3 MFC set to  0.000000
12/3/2012	3:38:50 PM	PH3 MFC set to  0.000000
12/3/2012	3:38:50 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:38:50 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:38:50 PM	Tube furnace set to 150
12/3/2012	3:39:20 PM	H2 valve closed
12/3/2012	3:39:20 PM	BCl3 valve closed
12/3/2012	3:39:20 PM	PH3 valve closed
12/3/2012	3:39:20 PM	SiCl4 pre valve closed
12/3/2012	3:39:20 PM	SiCl4 post valve closed
12/3/2012	3:39:20 PM	Bypass valve closed
12/3/2012	3:39:20 PM	Bubbler valve closed
12/3/2012	3:39:20 PM	Helium valve opened
12/3/2012	3:39:20 PM	Main Vac valve opened
12/3/2012	3:39:20 PM	Helium MFC set to  20.000000
12/3/2012	3:39:20 PM	H2 MFC set to  0.000000
12/3/2012	3:39:20 PM	BCl3 MFC set to  0.000000
12/3/2012	3:39:20 PM	PH3 MFC set to  0.000000
12/3/2012	3:39:20 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:39:20 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:39:21 PM	Tube furnace set to 150
12/3/2012	3:39:51 PM	Helium valve closed
12/3/2012	3:39:51 PM	H2 valve closed
12/3/2012	3:39:51 PM	BCl3 valve closed
12/3/2012	3:39:51 PM	PH3 valve closed
12/3/2012	3:39:51 PM	SiCl4 pre valve closed
12/3/2012	3:39:51 PM	SiCl4 post valve closed
12/3/2012	3:39:51 PM	Bypass valve closed
12/3/2012	3:39:51 PM	Bubbler valve closed
12/3/2012	3:39:51 PM	Main Vac valve opened
12/3/2012	3:39:51 PM	Helium MFC set to  0.000000
12/3/2012	3:39:51 PM	H2 MFC set to  0.000000
12/3/2012	3:39:51 PM	BCl3 MFC set to  0.000000
12/3/2012	3:39:51 PM	PH3 MFC set to  0.000000
12/3/2012	3:39:51 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:39:51 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:39:51 PM	Tube furnace set to 150
12/3/2012	3:40:21 PM	H2 valve closed
12/3/2012	3:40:21 PM	BCl3 valve closed
12/3/2012	3:40:21 PM	PH3 valve closed
12/3/2012	3:40:21 PM	SiCl4 pre valve closed
12/3/2012	3:40:21 PM	SiCl4 post valve closed
12/3/2012	3:40:21 PM	Bypass valve closed
12/3/2012	3:40:21 PM	Bubbler valve closed
12/3/2012	3:40:21 PM	Helium valve opened
12/3/2012	3:40:21 PM	Main Vac valve opened
12/3/2012	3:40:21 PM	Helium MFC set to  20.000000
12/3/2012	3:40:21 PM	H2 MFC set to  0.000000
12/3/2012	3:40:21 PM	BCl3 MFC set to  0.000000
12/3/2012	3:40:21 PM	PH3 MFC set to  0.000000
12/3/2012	3:40:21 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:40:21 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:40:21 PM	Tube furnace set to 150
12/3/2012	3:40:51 PM	Helium valve closed
12/3/2012	3:40:51 PM	H2 valve closed
12/3/2012	3:40:51 PM	BCl3 valve closed
12/3/2012	3:40:51 PM	PH3 valve closed
12/3/2012	3:40:51 PM	SiCl4 pre valve closed
12/3/2012	3:40:51 PM	SiCl4 post valve closed
12/3/2012	3:40:51 PM	Bypass valve closed
12/3/2012	3:40:51 PM	Bubbler valve closed
12/3/2012	3:40:51 PM	Main Vac valve opened
12/3/2012	3:40:51 PM	Helium MFC set to  0.000000
12/3/2012	3:40:51 PM	H2 MFC set to  0.000000
12/3/2012	3:40:51 PM	BCl3 MFC set to  0.000000
12/3/2012	3:40:51 PM	PH3 MFC set to  0.000000
12/3/2012	3:40:51 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:40:51 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:40:51 PM	Tube furnace set to 150
12/3/2012	3:41:21 PM	H2 valve closed
12/3/2012	3:41:21 PM	BCl3 valve closed
12/3/2012	3:41:21 PM	PH3 valve closed
12/3/2012	3:41:21 PM	SiCl4 pre valve closed
12/3/2012	3:41:21 PM	SiCl4 post valve closed
12/3/2012	3:41:21 PM	Bypass valve closed
12/3/2012	3:41:21 PM	Bubbler valve closed
12/3/2012	3:41:21 PM	Helium valve opened
12/3/2012	3:41:21 PM	Main Vac valve opened
12/3/2012	3:41:21 PM	Helium MFC set to  20.000000
12/3/2012	3:41:21 PM	H2 MFC set to  0.000000
12/3/2012	3:41:21 PM	BCl3 MFC set to  0.000000
12/3/2012	3:41:21 PM	PH3 MFC set to  0.000000
12/3/2012	3:41:21 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:41:21 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:41:22 PM	Tube furnace set to 150
12/3/2012	3:41:52 PM	Helium valve closed
12/3/2012	3:41:52 PM	H2 valve closed
12/3/2012	3:41:52 PM	BCl3 valve closed
12/3/2012	3:41:52 PM	PH3 valve closed
12/3/2012	3:41:52 PM	SiCl4 pre valve closed
12/3/2012	3:41:52 PM	SiCl4 post valve closed
12/3/2012	3:41:52 PM	Bypass valve closed
12/3/2012	3:41:52 PM	Bubbler valve closed
12/3/2012	3:41:52 PM	Main Vac valve opened
12/3/2012	3:41:52 PM	Helium MFC set to  0.000000
12/3/2012	3:41:52 PM	H2 MFC set to  0.000000
12/3/2012	3:41:52 PM	BCl3 MFC set to  0.000000
12/3/2012	3:41:52 PM	PH3 MFC set to  0.000000
12/3/2012	3:41:52 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:41:52 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:41:52 PM	Tube furnace set to 150
12/3/2012	3:42:22 PM	H2 valve closed
12/3/2012	3:42:22 PM	BCl3 valve closed
12/3/2012	3:42:22 PM	PH3 valve closed
12/3/2012	3:42:22 PM	SiCl4 pre valve closed
12/3/2012	3:42:22 PM	SiCl4 post valve closed
12/3/2012	3:42:22 PM	Bypass valve closed
12/3/2012	3:42:22 PM	Bubbler valve closed
12/3/2012	3:42:22 PM	Helium valve opened
12/3/2012	3:42:22 PM	Main Vac valve opened
12/3/2012	3:42:22 PM	Helium MFC set to  20.000000
12/3/2012	3:42:22 PM	H2 MFC set to  0.000000
12/3/2012	3:42:22 PM	BCl3 MFC set to  0.000000
12/3/2012	3:42:22 PM	PH3 MFC set to  0.000000
12/3/2012	3:42:22 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:42:22 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:42:22 PM	Tube furnace set to 150
12/3/2012	3:42:52 PM	Helium valve closed
12/3/2012	3:42:52 PM	H2 valve closed
12/3/2012	3:42:52 PM	BCl3 valve closed
12/3/2012	3:42:52 PM	PH3 valve closed
12/3/2012	3:42:52 PM	SiCl4 pre valve closed
12/3/2012	3:42:52 PM	SiCl4 post valve closed
12/3/2012	3:42:52 PM	Bypass valve closed
12/3/2012	3:42:52 PM	Bubbler valve closed
12/3/2012	3:42:52 PM	Main Vac valve opened
12/3/2012	3:42:52 PM	Helium MFC set to  0.000000
12/3/2012	3:42:52 PM	H2 MFC set to  0.000000
12/3/2012	3:42:52 PM	BCl3 MFC set to  0.000000
12/3/2012	3:42:52 PM	PH3 MFC set to  0.000000
12/3/2012	3:42:52 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:42:52 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:42:52 PM	Tube furnace set to 150
12/3/2012	3:43:22 PM	H2 valve closed
12/3/2012	3:43:22 PM	BCl3 valve closed
12/3/2012	3:43:22 PM	PH3 valve closed
12/3/2012	3:43:22 PM	SiCl4 pre valve closed
12/3/2012	3:43:22 PM	SiCl4 post valve closed
12/3/2012	3:43:22 PM	Bypass valve closed
12/3/2012	3:43:22 PM	Bubbler valve closed
12/3/2012	3:43:22 PM	Helium valve opened
12/3/2012	3:43:22 PM	Main Vac valve opened
12/3/2012	3:43:22 PM	Helium MFC set to  20.000000
12/3/2012	3:43:22 PM	H2 MFC set to  0.000000
12/3/2012	3:43:22 PM	BCl3 MFC set to  0.000000
12/3/2012	3:43:22 PM	PH3 MFC set to  0.000000
12/3/2012	3:43:22 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:43:22 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:43:23 PM	Tube furnace set to 150
12/3/2012	3:43:53 PM	Helium valve closed
12/3/2012	3:43:53 PM	H2 valve closed
12/3/2012	3:43:53 PM	BCl3 valve closed
12/3/2012	3:43:53 PM	PH3 valve closed
12/3/2012	3:43:53 PM	SiCl4 pre valve closed
12/3/2012	3:43:53 PM	SiCl4 post valve closed
12/3/2012	3:43:53 PM	Bypass valve closed
12/3/2012	3:43:53 PM	Bubbler valve closed
12/3/2012	3:43:53 PM	Main Vac valve opened
12/3/2012	3:43:53 PM	Helium MFC set to  0.000000
12/3/2012	3:43:53 PM	H2 MFC set to  0.000000
12/3/2012	3:43:53 PM	BCl3 MFC set to  0.000000
12/3/2012	3:43:53 PM	PH3 MFC set to  0.000000
12/3/2012	3:43:53 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:43:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:43:53 PM	Tube furnace set to 150
12/3/2012	3:44:23 PM	H2 valve closed
12/3/2012	3:44:23 PM	BCl3 valve closed
12/3/2012	3:44:23 PM	PH3 valve closed
12/3/2012	3:44:23 PM	SiCl4 pre valve closed
12/3/2012	3:44:23 PM	SiCl4 post valve closed
12/3/2012	3:44:23 PM	Bypass valve closed
12/3/2012	3:44:23 PM	Bubbler valve closed
12/3/2012	3:44:23 PM	Helium valve opened
12/3/2012	3:44:23 PM	Main Vac valve opened
12/3/2012	3:44:23 PM	Helium MFC set to  20.000000
12/3/2012	3:44:23 PM	H2 MFC set to  0.000000
12/3/2012	3:44:23 PM	BCl3 MFC set to  0.000000
12/3/2012	3:44:23 PM	PH3 MFC set to  0.000000
12/3/2012	3:44:23 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:44:23 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:44:23 PM	Tube furnace set to 150
12/3/2012	3:44:53 PM	Helium valve closed
12/3/2012	3:44:53 PM	H2 valve closed
12/3/2012	3:44:53 PM	BCl3 valve closed
12/3/2012	3:44:53 PM	PH3 valve closed
12/3/2012	3:44:53 PM	SiCl4 pre valve closed
12/3/2012	3:44:53 PM	SiCl4 post valve closed
12/3/2012	3:44:53 PM	Bypass valve closed
12/3/2012	3:44:53 PM	Bubbler valve closed
12/3/2012	3:44:53 PM	Main Vac valve opened
12/3/2012	3:44:53 PM	Helium MFC set to  0.000000
12/3/2012	3:44:53 PM	H2 MFC set to  0.000000
12/3/2012	3:44:53 PM	BCl3 MFC set to  0.000000
12/3/2012	3:44:53 PM	PH3 MFC set to  0.000000
12/3/2012	3:44:53 PM	SiCl4 MFC set to  0.000000
12/3/2012	3:44:53 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	3:44:53 PM	Tube furnace set to 150
12/3/2012	3:44:54 PM	Run finished at 3:44 PM
12/3/2012	4:15:49 PM	Main Vac valve closed
12/3/2012	4:16:03 PM	Main Vac valve opened
12/3/2012	4:16:24 PM	Recipe started at 4:16 PM
12/3/2012	4:16:24 PM	Helium valve closed
12/3/2012	4:16:24 PM	H2 valve closed
12/3/2012	4:16:24 PM	BCl3 valve closed
12/3/2012	4:16:24 PM	PH3 valve closed
12/3/2012	4:16:24 PM	SiCl4 pre valve closed
12/3/2012	4:16:24 PM	SiCl4 post valve closed
12/3/2012	4:16:24 PM	Main Vac valve closed
12/3/2012	4:16:24 PM	Bypass valve closed
12/3/2012	4:16:24 PM	Bubbler valve closed
12/3/2012	4:16:24 PM	Helium MFC set to  0.000000
12/3/2012	4:16:24 PM	H2 MFC set to  0.000000
12/3/2012	4:16:24 PM	BCl3 MFC set to  0.000000
12/3/2012	4:16:24 PM	PH3 MFC set to  0.000000
12/3/2012	4:16:24 PM	SiCl4 MFC set to  0.000000
12/3/2012	4:16:24 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	4:16:24 PM	Tube furnace set to 150
12/3/2012	4:16:27 PM	Helium valve closed
12/3/2012	4:16:27 PM	BCl3 valve closed
12/3/2012	4:16:27 PM	PH3 valve closed
12/3/2012	4:16:27 PM	SiCl4 pre valve closed
12/3/2012	4:16:27 PM	SiCl4 post valve closed
12/3/2012	4:16:27 PM	Main Vac valve closed
12/3/2012	4:16:27 PM	Bypass valve closed
12/3/2012	4:16:27 PM	Bubbler valve closed
12/3/2012	4:16:27 PM	H2 valve opened
12/3/2012	4:16:27 PM	Helium MFC set to  0.000000
12/3/2012	4:16:27 PM	H2 MFC set to  500.000000
12/3/2012	4:16:27 PM	BCl3 MFC set to  0.000000
12/3/2012	4:16:27 PM	PH3 MFC set to  0.000000
12/3/2012	4:16:27 PM	SiCl4 MFC set to  0.000000
12/3/2012	4:16:27 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	4:16:27 PM	Tube furnace set to 150
12/3/2012	4:17:39 PM	Helium valve closed
12/3/2012	4:17:39 PM	BCl3 valve closed
12/3/2012	4:17:39 PM	PH3 valve closed
12/3/2012	4:17:39 PM	SiCl4 pre valve closed
12/3/2012	4:17:39 PM	SiCl4 post valve closed
12/3/2012	4:17:39 PM	Main Vac valve closed
12/3/2012	4:17:39 PM	Bypass valve closed
12/3/2012	4:17:39 PM	H2 valve opened
12/3/2012	4:17:39 PM	Bubbler valve opened
12/3/2012	4:17:39 PM	Helium MFC set to  0.000000
12/3/2012	4:17:39 PM	H2 MFC set to  500.000000
12/3/2012	4:17:39 PM	BCl3 MFC set to  0.000000
12/3/2012	4:17:39 PM	PH3 MFC set to  0.000000
12/3/2012	4:17:39 PM	SiCl4 MFC set to  0.000000
12/3/2012	4:17:39 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	4:17:39 PM	Tube furnace set to 150
12/3/2012	4:17:40 PM	Helium valve closed
12/3/2012	4:17:40 PM	BCl3 valve closed
12/3/2012	4:17:40 PM	PH3 valve closed
12/3/2012	4:17:40 PM	SiCl4 pre valve closed
12/3/2012	4:17:40 PM	SiCl4 post valve closed
12/3/2012	4:17:40 PM	Main Vac valve closed
12/3/2012	4:17:40 PM	Bypass valve closed
12/3/2012	4:17:40 PM	H2 valve opened
12/3/2012	4:17:40 PM	Bubbler valve opened
12/3/2012	4:17:40 PM	Helium MFC set to  0.000000
12/3/2012	4:17:40 PM	H2 MFC set to  500.000000
12/3/2012	4:17:40 PM	BCl3 MFC set to  0.000000
12/3/2012	4:17:40 PM	PH3 MFC set to  0.000000
12/3/2012	4:17:40 PM	SiCl4 MFC set to  0.000000
12/3/2012	4:17:40 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	4:17:41 PM	Tube furnace set to 1000
12/3/2012	4:37:40 PM	Helium valve closed
12/3/2012	4:37:40 PM	PH3 valve closed
12/3/2012	4:37:40 PM	Main Vac valve closed
12/3/2012	4:37:40 PM	Bypass valve closed
12/3/2012	4:37:41 PM	H2 valve opened
12/3/2012	4:37:41 PM	BCl3 valve opened
12/3/2012	4:37:41 PM	SiCl4 pre valve opened
12/3/2012	4:37:41 PM	SiCl4 post valve opened
12/3/2012	4:37:41 PM	Bubbler valve opened
12/3/2012	4:37:41 PM	Helium MFC set to  0.000000
12/3/2012	4:37:41 PM	H2 MFC set to  450.000000
12/3/2012	4:37:41 PM	BCl3 MFC set to  1.300000
12/3/2012	4:37:41 PM	PH3 MFC set to  0.000000
12/3/2012	4:37:41 PM	SiCl4 MFC set to  50.000000
12/3/2012	4:37:41 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	4:37:41 PM	Tube furnace set to 1000
12/3/2012	4:57:41 PM	Helium valve closed
12/3/2012	4:57:41 PM	BCl3 valve closed
12/3/2012	4:57:41 PM	PH3 valve closed
12/3/2012	4:57:41 PM	SiCl4 pre valve closed
12/3/2012	4:57:41 PM	SiCl4 post valve closed
12/3/2012	4:57:41 PM	Main Vac valve closed
12/3/2012	4:57:41 PM	Bypass valve closed
12/3/2012	4:57:41 PM	H2 valve opened
12/3/2012	4:57:41 PM	Bubbler valve opened
12/3/2012	4:57:41 PM	Helium MFC set to  0.000000
12/3/2012	4:57:41 PM	H2 MFC set to  500.000000
12/3/2012	4:57:41 PM	BCl3 MFC set to  0.000000
12/3/2012	4:57:41 PM	PH3 MFC set to  0.000000
12/3/2012	4:57:41 PM	SiCl4 MFC set to  0.000000
12/3/2012	4:57:41 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	4:57:41 PM	Tube furnace set to 950
12/3/2012	5:00:41 PM	Helium valve closed
12/3/2012	5:00:41 PM	BCl3 valve closed
12/3/2012	5:00:41 PM	PH3 valve closed
12/3/2012	5:00:41 PM	SiCl4 pre valve closed
12/3/2012	5:00:41 PM	SiCl4 post valve closed
12/3/2012	5:00:41 PM	Main Vac valve closed
12/3/2012	5:00:41 PM	Bypass valve closed
12/3/2012	5:00:41 PM	H2 valve opened
12/3/2012	5:00:41 PM	Bubbler valve opened
12/3/2012	5:00:41 PM	Helium MFC set to  0.000000
12/3/2012	5:00:41 PM	H2 MFC set to  500.000000
12/3/2012	5:00:41 PM	BCl3 MFC set to  0.000000
12/3/2012	5:00:41 PM	PH3 MFC set to  0.000000
12/3/2012	5:00:41 PM	SiCl4 MFC set to  0.000000
12/3/2012	5:00:41 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	5:00:41 PM	Tube furnace set to 900
12/3/2012	5:03:41 PM	Helium valve closed
12/3/2012	5:03:41 PM	BCl3 valve closed
12/3/2012	5:03:41 PM	PH3 valve closed
12/3/2012	5:03:41 PM	SiCl4 pre valve closed
12/3/2012	5:03:41 PM	SiCl4 post valve closed
12/3/2012	5:03:41 PM	Main Vac valve closed
12/3/2012	5:03:41 PM	Bypass valve closed
12/3/2012	5:03:41 PM	H2 valve opened
12/3/2012	5:03:41 PM	Bubbler valve opened
12/3/2012	5:03:41 PM	Helium MFC set to  0.000000
12/3/2012	5:03:41 PM	H2 MFC set to  500.000000
12/3/2012	5:03:41 PM	BCl3 MFC set to  0.000000
12/3/2012	5:03:41 PM	PH3 MFC set to  0.000000
12/3/2012	5:03:41 PM	SiCl4 MFC set to  0.000000
12/3/2012	5:03:41 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	5:03:41 PM	Tube furnace set to 850
12/3/2012	5:06:41 PM	Helium valve closed
12/3/2012	5:06:41 PM	BCl3 valve closed
12/3/2012	5:06:41 PM	PH3 valve closed
12/3/2012	5:06:41 PM	SiCl4 pre valve closed
12/3/2012	5:06:41 PM	SiCl4 post valve closed
12/3/2012	5:06:41 PM	Main Vac valve closed
12/3/2012	5:06:41 PM	Bypass valve closed
12/3/2012	5:06:41 PM	H2 valve opened
12/3/2012	5:06:41 PM	Bubbler valve opened
12/3/2012	5:06:41 PM	Helium MFC set to  0.000000
12/3/2012	5:06:41 PM	H2 MFC set to  500.000000
12/3/2012	5:06:41 PM	BCl3 MFC set to  0.000000
12/3/2012	5:06:41 PM	PH3 MFC set to  0.000000
12/3/2012	5:06:41 PM	SiCl4 MFC set to  0.000000
12/3/2012	5:06:41 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	5:06:42 PM	Tube furnace set to 800
12/3/2012	5:09:42 PM	Helium valve closed
12/3/2012	5:09:42 PM	BCl3 valve closed
12/3/2012	5:09:42 PM	PH3 valve closed
12/3/2012	5:09:42 PM	SiCl4 pre valve closed
12/3/2012	5:09:42 PM	SiCl4 post valve closed
12/3/2012	5:09:42 PM	Main Vac valve closed
12/3/2012	5:09:42 PM	Bypass valve closed
12/3/2012	5:09:42 PM	H2 valve opened
12/3/2012	5:09:42 PM	Bubbler valve opened
12/3/2012	5:09:42 PM	Helium MFC set to  0.000000
12/3/2012	5:09:42 PM	H2 MFC set to  500.000000
12/3/2012	5:09:42 PM	BCl3 MFC set to  0.000000
12/3/2012	5:09:42 PM	PH3 MFC set to  0.000000
12/3/2012	5:09:42 PM	SiCl4 MFC set to  0.000000
12/3/2012	5:09:42 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	5:09:42 PM	Tube furnace set to 750
12/3/2012	5:12:42 PM	H2 valve closed
12/3/2012	5:12:42 PM	BCl3 valve closed
12/3/2012	5:12:42 PM	PH3 valve closed
12/3/2012	5:12:42 PM	SiCl4 pre valve closed
12/3/2012	5:12:42 PM	SiCl4 post valve closed
12/3/2012	5:12:42 PM	Main Vac valve closed
12/3/2012	5:12:42 PM	Bypass valve closed
12/3/2012	5:12:42 PM	Helium valve opened
12/3/2012	5:12:42 PM	Bubbler valve opened
12/3/2012	5:12:42 PM	Helium MFC set to  500.000000
12/3/2012	5:12:42 PM	H2 MFC set to  0.000000
12/3/2012	5:12:42 PM	BCl3 MFC set to  0.000000
12/3/2012	5:12:42 PM	PH3 MFC set to  0.000000
12/3/2012	5:12:42 PM	SiCl4 MFC set to  0.000000
12/3/2012	5:12:42 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	5:12:42 PM	Tube furnace set to 0
12/3/2012	5:32:42 PM	Helium valve closed
12/3/2012	5:32:42 PM	H2 valve closed
12/3/2012	5:32:42 PM	BCl3 valve closed
12/3/2012	5:32:42 PM	PH3 valve closed
12/3/2012	5:32:42 PM	SiCl4 pre valve closed
12/3/2012	5:32:42 PM	SiCl4 post valve closed
12/3/2012	5:32:42 PM	Main Vac valve closed
12/3/2012	5:32:42 PM	Bypass valve closed
12/3/2012	5:32:42 PM	Bubbler valve closed
12/3/2012	5:32:42 PM	Helium MFC set to  0.000000
12/3/2012	5:32:42 PM	H2 MFC set to  0.000000
12/3/2012	5:32:42 PM	BCl3 MFC set to  0.000000
12/3/2012	5:32:42 PM	PH3 MFC set to  0.000000
12/3/2012	5:32:42 PM	SiCl4 MFC set to  0.000000
12/3/2012	5:32:42 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	5:32:42 PM	Tube furnace set to 0
12/3/2012	6:02:42 PM	Helium valve closed
12/3/2012	6:02:42 PM	H2 valve closed
12/3/2012	6:02:42 PM	BCl3 valve closed
12/3/2012	6:02:42 PM	PH3 valve closed
12/3/2012	6:02:42 PM	SiCl4 pre valve closed
12/3/2012	6:02:42 PM	SiCl4 post valve closed
12/3/2012	6:02:42 PM	Main Vac valve closed
12/3/2012	6:02:42 PM	Bubbler valve closed
12/3/2012	6:02:42 PM	Bypass valve opened
12/3/2012	6:02:42 PM	Helium MFC set to  0.000000
12/3/2012	6:02:42 PM	H2 MFC set to  0.000000
12/3/2012	6:02:42 PM	BCl3 MFC set to  0.000000
12/3/2012	6:02:42 PM	PH3 MFC set to  0.000000
12/3/2012	6:02:42 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:02:42 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:02:43 PM	Tube furnace set to 0
12/3/2012	6:03:43 PM	Helium valve closed
12/3/2012	6:03:43 PM	H2 valve closed
12/3/2012	6:03:43 PM	BCl3 valve closed
12/3/2012	6:03:43 PM	PH3 valve closed
12/3/2012	6:03:43 PM	SiCl4 pre valve closed
12/3/2012	6:03:43 PM	SiCl4 post valve closed
12/3/2012	6:03:43 PM	Main Vac valve closed
12/3/2012	6:03:43 PM	Bubbler valve closed
12/3/2012	6:03:43 PM	Bypass valve opened
12/3/2012	6:03:43 PM	Helium MFC set to  0.000000
12/3/2012	6:03:43 PM	H2 MFC set to  0.000000
12/3/2012	6:03:43 PM	BCl3 MFC set to  0.000000
12/3/2012	6:03:43 PM	PH3 MFC set to  0.000000
12/3/2012	6:03:43 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:03:43 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:03:43 PM	Tube furnace set to 0
12/3/2012	6:04:43 PM	Helium valve closed
12/3/2012	6:04:43 PM	H2 valve closed
12/3/2012	6:04:43 PM	BCl3 valve closed
12/3/2012	6:04:43 PM	PH3 valve closed
12/3/2012	6:04:43 PM	SiCl4 pre valve closed
12/3/2012	6:04:43 PM	SiCl4 post valve closed
12/3/2012	6:04:43 PM	Bypass valve closed
12/3/2012	6:04:43 PM	Bubbler valve closed
12/3/2012	6:04:43 PM	Main Vac valve opened
12/3/2012	6:04:43 PM	Helium MFC set to  0.000000
12/3/2012	6:04:43 PM	H2 MFC set to  0.000000
12/3/2012	6:04:43 PM	BCl3 MFC set to  0.000000
12/3/2012	6:04:43 PM	PH3 MFC set to  0.000000
12/3/2012	6:04:43 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:04:43 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:04:43 PM	Tube furnace set to 0
12/3/2012	6:04:44 PM	Run finished at 6:04 PM
12/3/2012	6:23:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2012	6:23:24 PM	Recipe started at 6:23 PM
12/3/2012	6:23:24 PM	Helium valve closed
12/3/2012	6:23:24 PM	H2 valve closed
12/3/2012	6:23:24 PM	BCl3 valve closed
12/3/2012	6:23:24 PM	PH3 valve closed
12/3/2012	6:23:24 PM	SiCl4 pre valve closed
12/3/2012	6:23:24 PM	SiCl4 post valve closed
12/3/2012	6:23:24 PM	Main Vac valve closed
12/3/2012	6:23:24 PM	Bypass valve closed
12/3/2012	6:23:24 PM	Bubbler valve closed
12/3/2012	6:23:24 PM	Helium MFC set to  0.000000
12/3/2012	6:23:24 PM	H2 MFC set to  0.000000
12/3/2012	6:23:24 PM	BCl3 MFC set to  0.000000
12/3/2012	6:23:24 PM	PH3 MFC set to  0.000000
12/3/2012	6:23:24 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:23:24 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:23:25 PM	Tube furnace set to 0
12/3/2012	6:23:28 PM	H2 valve closed
12/3/2012	6:23:28 PM	BCl3 valve closed
12/3/2012	6:23:28 PM	PH3 valve closed
12/3/2012	6:23:28 PM	SiCl4 pre valve closed
12/3/2012	6:23:28 PM	SiCl4 post valve closed
12/3/2012	6:23:28 PM	Main Vac valve closed
12/3/2012	6:23:28 PM	Bypass valve closed
12/3/2012	6:23:28 PM	Bubbler valve closed
12/3/2012	6:23:28 PM	Helium valve opened
12/3/2012	6:23:28 PM	Helium MFC set to  500.000000
12/3/2012	6:23:28 PM	H2 MFC set to  0.000000
12/3/2012	6:23:28 PM	BCl3 MFC set to  0.000000
12/3/2012	6:23:28 PM	PH3 MFC set to  0.000000
12/3/2012	6:23:28 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:23:28 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:23:28 PM	Tube furnace set to 0
12/3/2012	6:24:34 PM	Helium valve closed
12/3/2012	6:24:34 PM	H2 valve closed
12/3/2012	6:24:34 PM	BCl3 valve closed
12/3/2012	6:24:34 PM	PH3 valve closed
12/3/2012	6:24:34 PM	SiCl4 pre valve closed
12/3/2012	6:24:34 PM	SiCl4 post valve closed
12/3/2012	6:24:34 PM	Main Vac valve closed
12/3/2012	6:24:34 PM	Bypass valve closed
12/3/2012	6:24:34 PM	Bubbler valve closed
12/3/2012	6:24:34 PM	Helium MFC set to  0.000000
12/3/2012	6:24:34 PM	H2 MFC set to  0.000000
12/3/2012	6:24:34 PM	BCl3 MFC set to  0.000000
12/3/2012	6:24:34 PM	PH3 MFC set to  0.000000
12/3/2012	6:24:34 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:24:34 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:24:35 PM	Tube furnace set to 0
12/3/2012	6:24:36 PM	Run finished at 6:24 PM
12/3/2012	6:24:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2012	6:28:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	6:28:33 PM	Recipe started at 6:28 PM
12/3/2012	6:28:33 PM	Helium valve closed
12/3/2012	6:28:33 PM	H2 valve closed
12/3/2012	6:28:33 PM	BCl3 valve closed
12/3/2012	6:28:33 PM	PH3 valve closed
12/3/2012	6:28:33 PM	SiCl4 pre valve closed
12/3/2012	6:28:33 PM	SiCl4 post valve closed
12/3/2012	6:28:33 PM	Main Vac valve closed
12/3/2012	6:28:33 PM	Bubbler valve closed
12/3/2012	6:28:33 PM	Bypass valve opened
12/3/2012	6:28:33 PM	Helium MFC set to  0.000000
12/3/2012	6:28:33 PM	H2 MFC set to  0.000000
12/3/2012	6:28:33 PM	BCl3 MFC set to  0.000000
12/3/2012	6:28:33 PM	PH3 MFC set to  0.000000
12/3/2012	6:28:33 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:28:33 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:28:33 PM	Tube furnace set to 0
12/3/2012	6:29:48 PM	Helium valve closed
12/3/2012	6:29:48 PM	H2 valve closed
12/3/2012	6:29:48 PM	BCl3 valve closed
12/3/2012	6:29:48 PM	PH3 valve closed
12/3/2012	6:29:48 PM	SiCl4 pre valve closed
12/3/2012	6:29:48 PM	SiCl4 post valve closed
12/3/2012	6:29:48 PM	Main Vac valve closed
12/3/2012	6:29:48 PM	Bubbler valve closed
12/3/2012	6:29:48 PM	Bypass valve opened
12/3/2012	6:29:48 PM	Helium MFC set to  0.000000
12/3/2012	6:29:48 PM	H2 MFC set to  0.000000
12/3/2012	6:29:48 PM	BCl3 MFC set to  0.000000
12/3/2012	6:29:48 PM	PH3 MFC set to  0.000000
12/3/2012	6:29:48 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:29:48 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:29:48 PM	Tube furnace set to 0
12/3/2012	6:30:48 PM	Helium valve closed
12/3/2012	6:30:48 PM	H2 valve closed
12/3/2012	6:30:48 PM	BCl3 valve closed
12/3/2012	6:30:48 PM	PH3 valve closed
12/3/2012	6:30:48 PM	SiCl4 pre valve closed
12/3/2012	6:30:48 PM	SiCl4 post valve closed
12/3/2012	6:30:48 PM	Bypass valve closed
12/3/2012	6:30:48 PM	Bubbler valve closed
12/3/2012	6:30:48 PM	Main Vac valve opened
12/3/2012	6:30:48 PM	Helium MFC set to  0.000000
12/3/2012	6:30:48 PM	H2 MFC set to  0.000000
12/3/2012	6:30:48 PM	BCl3 MFC set to  0.000000
12/3/2012	6:30:48 PM	PH3 MFC set to  0.000000
12/3/2012	6:30:48 PM	SiCl4 MFC set to  0.000000
12/3/2012	6:30:48 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	6:30:48 PM	Tube furnace set to 0
12/3/2012	6:30:49 PM	Run finished at 6:30 PM
12/3/2012	6:30:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2012	7:10:26 PM	Main Vac valve closed
12/3/2012	7:10:41 PM	Main Vac valve opened
12/3/2012	7:13:03 PM	Recipe started at 7:12 PM
12/3/2012	7:13:03 PM	Helium valve closed
12/3/2012	7:13:03 PM	H2 valve closed
12/3/2012	7:13:03 PM	BCl3 valve closed
12/3/2012	7:13:03 PM	PH3 valve closed
12/3/2012	7:13:03 PM	SiCl4 pre valve closed
12/3/2012	7:13:03 PM	SiCl4 post valve closed
12/3/2012	7:13:03 PM	Bypass valve closed
12/3/2012	7:13:03 PM	Bubbler valve closed
12/3/2012	7:13:03 PM	Main Vac valve opened
12/3/2012	7:13:03 PM	Helium MFC set to  0.000000
12/3/2012	7:13:03 PM	H2 MFC set to  0.000000
12/3/2012	7:13:03 PM	BCl3 MFC set to  0.000000
12/3/2012	7:13:03 PM	PH3 MFC set to  0.000000
12/3/2012	7:13:03 PM	SiCl4 MFC set to  0.000000
12/3/2012	7:13:03 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	7:13:03 PM	Tube furnace set to 150
12/3/2012	7:13:25 PM	Run aborted at 7:13 PM
12/3/2012	7:13:25 PM	Helium valve closed
12/3/2012	7:13:25 PM	H2 valve closed
12/3/2012	7:13:25 PM	BCl3 valve closed
12/3/2012	7:13:25 PM	PH3 valve closed
12/3/2012	7:13:25 PM	SiCl4 pre valve closed
12/3/2012	7:13:25 PM	SiCl4 post valve closed
12/3/2012	7:13:25 PM	Bypass valve closed
12/3/2012	7:13:25 PM	Main Vac valve closed
12/3/2012	7:13:25 PM	Bubbler valve closed
12/3/2012	7:13:25 PM	Helium MFC set to  0.000000
12/3/2012	7:13:25 PM	H2 MFC set to  0.000000
12/3/2012	7:13:25 PM	BCl3 MFC set to  0.000000
12/3/2012	7:13:25 PM	PH3 MFC set to  0.000000
12/3/2012	7:13:25 PM	SiCl4 MFC set to  0.000000
12/3/2012	7:13:25 PM	Tube furnace set to 0
12/3/2012	7:13:28 PM	Main Vac valve opened
12/3/2012	7:15:04 PM	Recipe started at 7:15 PM
12/3/2012	7:15:04 PM	Helium valve closed
12/3/2012	7:15:04 PM	H2 valve closed
12/3/2012	7:15:04 PM	BCl3 valve closed
12/3/2012	7:15:04 PM	PH3 valve closed
12/3/2012	7:15:04 PM	SiCl4 pre valve closed
12/3/2012	7:15:04 PM	SiCl4 post valve closed
12/3/2012	7:15:04 PM	Bypass valve closed
12/3/2012	7:15:04 PM	Bubbler valve closed
12/3/2012	7:15:04 PM	Main Vac valve opened
12/3/2012	7:15:04 PM	Helium MFC set to  0.000000
12/3/2012	7:15:04 PM	H2 MFC set to  0.000000
12/3/2012	7:15:04 PM	BCl3 MFC set to  0.000000
12/3/2012	7:15:04 PM	PH3 MFC set to  0.000000
12/3/2012	7:15:04 PM	SiCl4 MFC set to  0.000000
12/3/2012	7:15:04 PM	Bypass solenoid MFC set to  0.000000
12/3/2012	7:15:04 PM	Tube furnace set to 150
